Optical Crossover in thin silicon
First Claim
1. A silicon-on-insulator (SOI)-based optical device including a surface silicon waveguiding layer disposed over an insulating layer covering a silicon substrate, the SOI-based optical device comprising:
- a first optical waveguide for supporting the propagation of a first optical signal;
a second optical waveguide for supporting the propagation of a second optical signal; and
an optical crossover region defined by an intersection of the first optical waveguide with the second optical waveguide, the optical crossover region exhibiting a geometry defined to reduce crosstalk between the first and second optical signals in the crossover region and improve optical throughput within the optical crossover region.
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Abstract
An arrangement for providing optical crossovers between waveguides formed in an SOI-based structure utilize a patterned geometry in the SOI structure that is selected to reduce the effects of crosstalk in the area where the signals overlap. Preferably, the optical signals are fixed to propagate along orthogonal directions (or are of different wavelengths) to minimize the effects of crosstalk. The geometry of the SOI structure is patterned to include predetermined tapers and/or reflecting surfaces to direct/shape the propagating optical signals. The patterned waveguide regions within the optical crossover region may be formed to include overlying polysilicon segments to further shape the propagating beams and improve the coupling efficiency of the crossover arrangement.
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Citations
24 Claims
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1. A silicon-on-insulator (SOI)-based optical device including a surface silicon waveguiding layer disposed over an insulating layer covering a silicon substrate, the SOI-based optical device comprising:
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a first optical waveguide for supporting the propagation of a first optical signal;
a second optical waveguide for supporting the propagation of a second optical signal; and
an optical crossover region defined by an intersection of the first optical waveguide with the second optical waveguide, the optical crossover region exhibiting a geometry defined to reduce crosstalk between the first and second optical signals in the crossover region and improve optical throughput within the optical crossover region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification