Method and apparatus for lubricating microelectromechanical devices in packages
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Accused Products
Abstract
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
28 Citations
96 Claims
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1-66. -66. (canceled)
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67. A microelectromechadical package, comprising:
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a package substrate;
a microelectromechanical device having a surface to be lubricated, wherein the microclectromechanical device is disposed on the package substrate;
a container containing a lubricant that evaporates from an opening of the container so and contacts the surface to be lubricated; and
a package cover that is bonded to the package substrate for sealing the package. - View Dependent Claims (68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96)
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Specification