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PHOBIC BARRIER MENISCUS SEPARATION AND CONTAINMENT

  • US 20050217135A1
  • Filed: 09/30/2004
  • Published: 10/06/2005
  • Est. Priority Date: 09/30/2002
  • Status: Active Grant
First Claim
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1. A method for processing a substrate, comprising:

  • generating a first fluid meniscus and a second fluid meniscus on a surface of the substrate, the first fluid meniscus being substantially adjacent to the second fluid meniscus, and the first fluid meniscus and the second fluid meniscus being generated between a surface of a proximity head and the surface of the substrate; and

    substantially separating the first fluid meniscus and the second fluid meniscus with a barrier.

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