PHOBIC BARRIER MENISCUS SEPARATION AND CONTAINMENT
First Claim
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1. A method for processing a substrate, comprising:
- generating a first fluid meniscus and a second fluid meniscus on a surface of the substrate, the first fluid meniscus being substantially adjacent to the second fluid meniscus, and the first fluid meniscus and the second fluid meniscus being generated between a surface of a proximity head and the surface of the substrate; and
substantially separating the first fluid meniscus and the second fluid meniscus with a barrier.
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Abstract
In one of the many embodiments, a method for processing a substrate is provided which includes generating a first fluid meniscus and a second fluid meniscus on a surface of the substrate where the first fluid meniscus being substantially adjacent to the second fluid meniscus. The meniscus also includes substantially separating the first fluid meniscus and the second fluid meniscus with a barrier.
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Citations
28 Claims
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1. A method for processing a substrate, comprising:
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generating a first fluid meniscus and a second fluid meniscus on a surface of the substrate, the first fluid meniscus being substantially adjacent to the second fluid meniscus, and the first fluid meniscus and the second fluid meniscus being generated between a surface of a proximity head and the surface of the substrate; and
substantially separating the first fluid meniscus and the second fluid meniscus with a barrier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An apparatus for processing a substrate, comprising:
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a proximity head including, a first set of conduits defined within the proximity head, the first set of conduits configured to generate a first fluid meniscus between a surface of the proximity head and a surface of the substrate;
a second set of conduits defined within the proximity head, the second set of conduits configured to generate a second fluid meniscus between the surface of the proximity head and the surface of the substrate; and
a barrier defined between the first set of conduits and the second set of conduits, the barrier configured to substantially separate the first fluid meniscus and the second fluid meniscus. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
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22. An apparatus for processing a substrate, comprising:
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a proximity head capable of generating a first fluid meniscus and capable of generating a second fluid meniscus, the proximity head including, at least one first inlet defined in a processing surface of the proximity head configured to apply a first fluid to the surface of the wafer;
at least one first outlet defined in the processing surface of the proximity head configured to remove the first fluid and at least a portion of a second fluid from the surface of the wafer;
at least one second inlet defined in the processing surface of the proximity head configured to apply the second fluid to the surface of the wafer;
at least one second outlet defined in the processing surface of the proximity head configured to remove at least a portion of the second fluid from the surface of the wafer; and
a barrier defined between the at least one first outlet and the at least one second outlet, the barrier being configured to substantially separate the first fluid meniscus and a the second fluid meniscus. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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Specification