Physical quantity sensor having angular speed sensor and acceleration sensor
First Claim
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1. A physical quantity sensor comprising:
- a substrate;
three angular speed sensors disposed on the substrate; and
three acceleration sensors disposed on the substrate, wherein the three angular speed sensors are capable of detecting three components of an angular speed around three axes, each two of which intersect perpendicularly, the three acceleration sensors are capable of detecting three components of an acceleration in another three axes, each two of which intersect perpendicularly, the three axes of the angular speed sensors intersect at one point, and the other three axes of the acceleration sensors intersect at another one point.
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Abstract
A physical quantity sensor includes: a substrate; three angular speed sensors disposed on the substrate; and three acceleration sensors disposed on the substrate. The three angular speed sensors are capable of detecting three components of an angular speed around three axes, each two of which intersect perpendicularly. The three acceleration sensors are capable of detecting three components of an acceleration in another three axes, each two of which intersect perpendicularly. The three axes of the angular speed sensors intersect at one point, and the other three axes of the acceleration sensors intersect at another one point.
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Citations
4 Claims
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1. A physical quantity sensor comprising:
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a substrate;
three angular speed sensors disposed on the substrate; and
three acceleration sensors disposed on the substrate, wherein the three angular speed sensors are capable of detecting three components of an angular speed around three axes, each two of which intersect perpendicularly, the three acceleration sensors are capable of detecting three components of an acceleration in another three axes, each two of which intersect perpendicularly, the three axes of the angular speed sensors intersect at one point, and the other three axes of the acceleration sensors intersect at another one point. - View Dependent Claims (2, 3, 4)
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Specification