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Inertial sensor

  • US 20050217373A1
  • Filed: 03/29/2005
  • Published: 10/06/2005
  • Est. Priority Date: 03/30/2004
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • a sensing portion having a weight supported by beams, the weight being a movable portion; and

    a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.

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