Planar 3-axis intertial measurement unit
First Claim
1. A planar solid-state three-axis inertial measurement unit, manufactured mainly by a conductive material, a number of solid-state inertial sensors installed between two parallel plates;
- a first solid-state gyroscope, the angular velocity sensing axis thereof being parallel to the x-axis of the plate surfaces, the configuration thereof comprising;
a first and second sets of a proof mass and two driver bodies, a first elastic beam assembly, a first drivers assembly and a first sensors assembly;
the first and second sets of proof mass and driver bodies suspended between the two plates by the first elastic beam assembly so that the first and second sets of proof mass and driver bodies can move along the y-axis parallel to the plate surfaces, and the first and second proof masses can also move along the z-axis perpendicular to the plate surfaces;
the first drivers assembly driving the first and second sets of proof mass and driver bodies to vibrate in the opposite direction along the y-axis;
the first sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the first and second proof masses along the z-axis, that meaning the x-axial angular velocity and the z-axial acceleration;
a second solid-state gyroscope, the angular velocity sensing axis thereof being parallel to the y′
-axis of the plate surfaces, the configuration thereof comprising;
a third and fourth sets of a proof mass and two driver bodies, a second elastic beam assembly, a second drivers assembly and a second sensors assembly;
the third and fourth sets of proof mass and driver bodies suspended between the two plates by the second elastic beam assembly so that the third and fourth sets of proof mass and driver bodies can move along the x′
-axis parallel to the plate surfaces, and the third and fourth proof masses can also move along the z-axis;
the second drivers assembly driving the third and fourth sets of proof mass and driver bodies to vibrate in the opposite direction along the x′
-axis;
the second sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the third and fourth proof masses along the z-axis, that meaning the y′
-axial angular velocity and the z-axial acceleration;
the preceding x′
, y′
, and z axes are orthogonal;
a third solid-state gyroscope, the angular velocity sensing axis thereof, z-axial, being perpendicular to the plate surfaces, the configuration thereof comprising;
a fifth and sixth sets of a proof mass and two driver bodies, a third elastic beam assembly, a third drivers assembly and a third sensors assembly;
the fifth and sixth sets of proof mass and driver bodies suspended between the two plates by the third elastic beam assembly so that the fifth and sixth sets of proof mass and driver bodies can move along the y-axis parallel to the plate surfaces, and the fifth and sixth proof masses can also move along the x′
-axis;
the third drivers assembly driving the fifth and sixth sets of proof mass and driver bodies to vibrate in the opposite direction along the y-axis;
the third sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the fifth and sixth proof masses along the x′
-axis, that meaning the z-axial angular velocity and the x′
-axial acceleration;
one of a fourth solid-state gyroscope and a y-axial solid-state accelerometer;
the fourth solid-state gyroscope, which the angular velocity sensing axis thereof, z-axial, is perpendicular to the plate surfaces, the configuration thereof comprising;
a seventh and eighth sets of a proof mass and two driver bodies, a fourth elastic beam assembly, a fourth drivers assembly and a fourth sensors assembly;
the seventh and eighth sets of proof mass and driver bodies respectively suspended between the two plates by the fourth elastic beam assembly so that the seventh and eighth sets of proof mass and driver bodies can move along the x′
-axis parallel to the plate surfaces, and the seventh and eighth proof masses can also move along the y-axis;
the fourth drivers assembly driving the seventh and eighth sets of proof mass and driver bodies to vibrate in the opposite direction along the x′
-axis;
the fourth sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the seventh and eighth proof masses along the y-axis, that meaning the z-axial angular velocity and the y-axial acceleration;
the configuration of the y-axial solid-state accelerometer comprising;
a ninth proof mass, a fifth elastic beam assembly, and a fifth sensors assembly;
the ninth proof mass suspended between the two plates by the fifth elastic beam assembly so that the ninth proof mass can move along the y-axis;
the fifth sensors assembly being able to sense the y-axial acceleration signal.
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Abstract
The present invention relates to a z-axial solid-state gyroscope. Its main configuration is manufactured with a conductive material and includes two sets of a proof mass and two driver bodies suspended between two plates by an elastic beam assembly. Both surfaces of the driver bodies and the proof masses respectively include a number of grooves respectively perpendicular to a first axis and a second axis. The surfaces of the driver bodies and the proof masses and the corresponding stripe electrodes of the plates thereof are respectively formed a driving capacitors and a sensing capacitors. The driving capacitor drives the proof masses to vibrate in the opposite direction along the first axis. If a z-axial angular velocity input, a Coriolis force makes the two masses vibrate in the opposite direction along the second axis. If a second axial acceleration input, a specific force makes the two masses move in the same direction along the second axis. Both inertial forces make the sensing capacitances change. Two z-axial solid-state gyroscopes and two in-plane axial gyroscopes can be designed on a single chip to form a complete three-axis inertial measurement unit.
15 Citations
11 Claims
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1. A planar solid-state three-axis inertial measurement unit, manufactured mainly by a conductive material, a number of solid-state inertial sensors installed between two parallel plates;
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a first solid-state gyroscope, the angular velocity sensing axis thereof being parallel to the x-axis of the plate surfaces, the configuration thereof comprising;
a first and second sets of a proof mass and two driver bodies, a first elastic beam assembly, a first drivers assembly and a first sensors assembly;
the first and second sets of proof mass and driver bodies suspended between the two plates by the first elastic beam assembly so that the first and second sets of proof mass and driver bodies can move along the y-axis parallel to the plate surfaces, and the first and second proof masses can also move along the z-axis perpendicular to the plate surfaces;
the first drivers assembly driving the first and second sets of proof mass and driver bodies to vibrate in the opposite direction along the y-axis;
the first sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the first and second proof masses along the z-axis, that meaning the x-axial angular velocity and the z-axial acceleration;
a second solid-state gyroscope, the angular velocity sensing axis thereof being parallel to the y′
-axis of the plate surfaces, the configuration thereof comprising;
a third and fourth sets of a proof mass and two driver bodies, a second elastic beam assembly, a second drivers assembly and a second sensors assembly;
the third and fourth sets of proof mass and driver bodies suspended between the two plates by the second elastic beam assembly so that the third and fourth sets of proof mass and driver bodies can move along the x′
-axis parallel to the plate surfaces, and the third and fourth proof masses can also move along the z-axis;
the second drivers assembly driving the third and fourth sets of proof mass and driver bodies to vibrate in the opposite direction along the x′
-axis;
the second sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the third and fourth proof masses along the z-axis, that meaning the y′
-axial angular velocity and the z-axial acceleration;
the preceding x′
, y′
, and z axes are orthogonal;
a third solid-state gyroscope, the angular velocity sensing axis thereof, z-axial, being perpendicular to the plate surfaces, the configuration thereof comprising;
a fifth and sixth sets of a proof mass and two driver bodies, a third elastic beam assembly, a third drivers assembly and a third sensors assembly;
the fifth and sixth sets of proof mass and driver bodies suspended between the two plates by the third elastic beam assembly so that the fifth and sixth sets of proof mass and driver bodies can move along the y-axis parallel to the plate surfaces, and the fifth and sixth proof masses can also move along the x′
-axis;
the third drivers assembly driving the fifth and sixth sets of proof mass and driver bodies to vibrate in the opposite direction along the y-axis;
the third sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the fifth and sixth proof masses along the x′
-axis, that meaning the z-axial angular velocity and the x′
-axial acceleration;
one of a fourth solid-state gyroscope and a y-axial solid-state accelerometer;
the fourth solid-state gyroscope, which the angular velocity sensing axis thereof, z-axial, is perpendicular to the plate surfaces, the configuration thereof comprising;
a seventh and eighth sets of a proof mass and two driver bodies, a fourth elastic beam assembly, a fourth drivers assembly and a fourth sensors assembly;
the seventh and eighth sets of proof mass and driver bodies respectively suspended between the two plates by the fourth elastic beam assembly so that the seventh and eighth sets of proof mass and driver bodies can move along the x′
-axis parallel to the plate surfaces, and the seventh and eighth proof masses can also move along the y-axis;
the fourth drivers assembly driving the seventh and eighth sets of proof mass and driver bodies to vibrate in the opposite direction along the x′
-axis;
the fourth sensors assembly being able to sense the vibration in the opposite direction and the displacement in the same direction of the seventh and eighth proof masses along the y-axis, that meaning the z-axial angular velocity and the y-axial acceleration;
the configuration of the y-axial solid-state accelerometer comprising;
a ninth proof mass, a fifth elastic beam assembly, and a fifth sensors assembly;
the ninth proof mass suspended between the two plates by the fifth elastic beam assembly so that the ninth proof mass can move along the y-axis;
the fifth sensors assembly being able to sense the y-axial acceleration signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification