Physical quantity sensor having angular speed sensor and acceleration sensor
First Claim
1. A physical quantity sensor comprising:
- a substrate;
an angular speed sensor disposed on the substrate; and
an acceleration sensor disposed on the substrate, wherein the angular speed sensor includes an oscillator capable of oscillating by a driving force and displaceable in accordance with a Coriolis force attributed to an angular speed of the oscillator, the acceleration sensor includes a movable portion displaceable in accordance with an acceleration of the acceleration sensor, and the oscillator has a driving direction, which is not parallel to a displacement direction of the movable portion.
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Accused Products
Abstract
A physical quantity sensor includes: a substrate; an angular speed sensor disposed on the substrate; and an acceleration sensor disposed on the substrate. The angular speed sensor includes an oscillator capable of oscillating by a driving force and displaceable in accordance with a Coriolis force attributed to an angular speed of the oscillator. The acceleration sensor includes a movable portion displaceable in accordance with an acceleration applied to the acceleration sensor. The oscillator has a driving direction, which is not parallel to a displacement direction of the movable portion. The physical quantity sensor having the angular speed sensor and the acceleration sensor detects both of the angular speed and the acceleration with high accuracy.
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Citations
9 Claims
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1. A physical quantity sensor comprising:
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a substrate;
an angular speed sensor disposed on the substrate; and
an acceleration sensor disposed on the substrate, wherein the angular speed sensor includes an oscillator capable of oscillating by a driving force and displaceable in accordance with a Coriolis force attributed to an angular speed of the oscillator, the acceleration sensor includes a movable portion displaceable in accordance with an acceleration of the acceleration sensor, and the oscillator has a driving direction, which is not parallel to a displacement direction of the movable portion. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A physical quantity sensor comprising:
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a mounting base;
an angular speed sensor disposed on the mounting base; and
an acceleration sensor disposed on the mounting base, wherein the angular speed sensor includes an oscillator capable of oscillating by a driving force and capable of being displaced in accordance with a Coriolis force attributed to an angular speed applied to the angular speed sensor, the acceleration sensor includes a movable portion displaceable in accordance with an acceleration applied to the acceleration sensor, the oscillator of the angular speed sensor has a resonant frequency in a driving direction, the movable portion of the acceleration sensor has another resonant frequency in a displacement direction, and the resonant frequency of the oscillator is equal to or larger than square root of two times the resonant frequency of the movable portion.
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8. A physical quantity sensor comprising:
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a mounting base;
an angular speed sensor disposed on the mounting base; and
an acceleration sensor disposed on the mounting base, wherein the angular speed sensor includes an oscillator capable of oscillating by a driving force and capable of being displaced in accordance with a Coriolis force attributed to an angular speed applied to the angular speed sensor, the acceleration sensor includes a movable portion displaceable in accordance with an acceleration applied to the acceleration sensor, the oscillator of the angular speed sensor has a resonant frequency in the driving direction, the angular speed sensor is disposed on the mounting base through an adhesive layer, the adhesive layer of the angular speed sensor has another resonant frequency, and the resonant frequency of the oscillator is equal to or larger than square root of two times the resonant frequency of the adhesive layer.
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9. A physical quantity sensor comprising:
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a mounting base;
an angular speed sensor disposed on the mounting base; and
an acceleration sensor disposed on the mounting base, wherein the angular speed sensor includes an oscillator capable of oscillating by a driving force and capable of being displaced in accordance with a Coriolis force attributed to an angular speed applied to the oscillator, the acceleration sensor includes a movable portion displaceable in accordance with an acceleration applied to the acceleration sensor, the oscillator of the angular speed sensor has a resonant frequency in the driving direction, the acceleration sensor is disposed on the mounting base through an adhesive layer, the adhesive layer of the acceleration sensor has another resonant frequency, and the resonant frequency of the oscillator is equal to or larger than square root of two times the resonant frequency of the adhesive layer.
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Specification