Fluid assisted cryogenic cleaning

• US 20050217706A1
• Filed: 04/03/2003
• Published: 10/06/2005
• Est. Priority Date: 04/05/2002
• Status: Abandoned Application

• Current Assignee: BOC, Inc.
• Original Assignee: BOC, Inc.
• Inventors: Banerjee, Souvik, Chung, Harlan Forrest
• Application Number:
  US10/509,955
• Publication Number:
  US 20050217706A1
• Time in Patent Office: Days
• US Class Current: 134/26
• CPC Class Codes: B08B 7/0092 by cooling
• CPC Class Codes: H01L 21/02063 the processing being the formation of vias or contact holes

Abstract

The present invention is directed to fluid assisted cryogenic cleaning of a substrate surface requiring precision cleaning such as semiconductors, metals, and dielectric films. The process comprises the steps of applying a fluid selected from the group consisting of high vapor pressure liquids, reactive gases, and vapors of reactive liquids onto the substrate surface followed by or simultaneously with cryogenic cleaning of the substrate surface to remove contaminants.

Claims

1. A process for the removal of contaminants from a surface of a substrate requiring precision cleaning, comprising:

(a) applying at least one fluid to the substrate surface, the fluid selected from the group consisting of a high vapor pressure liquid, a reactive gas, and vapor of a reactive liquid; and

(b) cryogenically cleaning the surface of the substrate.

2. The process of claim 1 wherein (a) and (b) are carried out simultaneously.

3. The process of claim 1 wherein (a) and (b) are carried out sequentially.

4. The process of claim 1 wherein the at least one fluid is a high vapor pressure liquid selected from the group consisting of ethanol, acetone, ethanol-acetone mixtures, isopropyl alcohol, methanol, methyl formate, methyl iodide, ethyl bromide, acetonitrile, ethyl chloride, pyrrolidine, tetrahydrofuran and mixtures thereof.

5. The process of claim 1 wherein the at least one fluid is a vapor of a reactive liquid selected from the group of liquids consisting of ethanol, acetone, ethanol-acetone mixtures, isopropyl alcohol, methanol, methyl formate, methyl iodide, ethyl bromide, and mixtures thereof.

6. The process of claim 1 wherein the at least one fluid is a reactive gas selected from the group consisting of ozone, water vapor, hydrogen, nitrogen, nitrogen oxides, nitrogen triflouride, helium, argon, neon, sulfur trioxide, oxygen, fluorine, fluorocarbon gases and mixtures thereof.

7. The process of claim 1 wherein the at least one fluid is a reactive gas or vapor selected from the group consisting of isopropyl alcohol, ethanol-acetone mixtures, methanol, ozone, water vapor, nitrogen triflouride, sulfur trioxide, oxygen, fluorine and fluorocarbon gases, and mixtures thereof.

8. The process of claim 1 wherein the fluid remains in contact with the surface for up to 10 minutes prior to the cryogenic cleaning.

9. The process of claim 8 wherein the fluid remains in contact with the surface for less than 2 minutes prior to the cryogenic cleaning.

10. The process of claim 1 wherein the contaminants are less than 0.76 μ

m in size.

11. The process of claim 1 wherein the contaminants are less than 0.13 μ

m in size.

12. The process of claim 1 wherein the high vapor pressure liquid has a vapor pressure greater than about 5 kPa at 25°

C., and a freezing point below about −

50°

C.

13. The process of claim 1 wherein the high vapor pressure liquid has a dipole moment of greater than about 1.5 D.

14. The process of claim 1 wherein the high vapor pressure liquid remains on the surface in a layer of at least 5 Δ

for less than 10 minutes and preferably less than 2 minutes prior to the cryogenic cleaning.

15. The process of claim 4 further comprising the high vapor pressure liquid removing bulk water from the substrate surface.

16. The process of claim 1 wherein the substrate surface is a semiconductor, metal or dielectric film.

17. The process of claim 1 wherein the at least one fluid is a reactive gas or vapor which reacts with the contaminants on the surface to form a volatile gaseous byproduct;

and further comprising;

maintaining the reactive gas or vapor in contact with the surface for up to 20 minutes, and removing the gaseous byproduct prior to the cryogenic cleaning.

18. The process of claim 17 wherein the reactive gas or vapor is introduced in a chamber containing the substrate, under low pressure and/or at temperatures of up to 200°

C.

19. The process of claim 18 wherein removing the byproduct comprises purging the chamber with nitrogen or clean dry air.

20. The process of claim 17 wherein the reactive gas or vapor is applied to the surface in the presence of a free radical initiator to generate reactive chemical byproducts from the reactive gas or vapour and the contaminants.

21. The process of claim 20 wherein the free radical initiator is selected from the group consisting of ultraviolet light, x-ray, laser, corona discharge, and plasma.