Active damping apparatus, exposure apparatus and device manufacturing method

• US 20050217956A1
• Filed: 05/17/2005
• Published: 10/06/2005
• Est. Priority Date: 04/19/2002
• Status: Active Grant

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Morisada, Masahiro
• Granted Patent: US 7,264,235 B2
• Time in Patent Office: Days
• US Class Current: 188/378
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An active damping apparatus for damping vibration due to driving of a stage and/or counter-mass mounted on an isolation table in an exposure device for the manufacture of semiconductor devices has a setting unit for selecting the stage and/or the counter-mass to drive and setting a control mode according to what is to be driven. The apparatus further has a control input switch that sets up a control loop for inputting control target values for driving the stage and/or the counter-mass to an isolation table controller so as to offset the drive reaction torque generated by the movement of the stage and/or counter-mass.

Claims

1. An active damping apparatus comprising:

an isolation table mounting a stage and a counter-mass;

an isolation table controller operatively connected to the isolation table for supporting the isolation table and adjusting a position and an attitude of the isolation table;

a setting unit operatively connected to the controller and adapted to select a combination of the stage and/or the counter-mass to be driven and to set a drive control mode according to what is to be driven; and

a control input switch operatively connected to the setting unit and adapted to select a control loop that inputs into the isolation table controller a control target value for adjusting the drive of that which is to be driven according to the drive control mode selected by the setting unit,

wherein the active damping apparatus damps vibration by driving the stage and/or counter-mass mounted on the isolation table so as to offset a drive reaction torque and a counter-mass movement moment.

2-12. -12. (canceled)