Infrared sensor
First Claim
1. An infrared sensor comprising:
- an infrared detector for converting infrared light to an electric signal; and
an optical element for guiding the infrared light to said infrared detector;
wherein;
said optical element has an array of materials of different refractive indexes and is formed in the surface of a substrate side by side with said infrared detector; and
infrared light incident on said optical element from a direction vertical to the surface of said substrate is deflected and guided by said optical element in parallel to the surface of said substrate for incidence on said infrared detector.
1 Assignment
0 Petitions
Accused Products
Abstract
An infrared sensor which is provided with an infrared detector 43 for converting infrared light to an electric signal and an optical element 44 for guiding the infrared light to the infrared detector 43, and in which the optical element 44 is a planar optical waveguide provided with a diffraction grating and is formed on a substrate 41 side by side with the infrared detector 43. The infrared light incident on the optical element 44 from a direction vertical to the substrate surface is deflected and guided by the optical element 44 in parallel to the substrate surface for incidence on the infrared detector 43. The infrared sensor is small in size, highly sensitive, fast in responsivity, and easy to manufacture.
20 Citations
10 Claims
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1. An infrared sensor comprising:
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an infrared detector for converting infrared light to an electric signal; and
an optical element for guiding the infrared light to said infrared detector;
wherein;
said optical element has an array of materials of different refractive indexes and is formed in the surface of a substrate side by side with said infrared detector; and
infrared light incident on said optical element from a direction vertical to the surface of said substrate is deflected and guided by said optical element in parallel to the surface of said substrate for incidence on said infrared detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification