Measuring method, inspection method, inspection device, semiconductor device, method of manufacturing a semiconductor device, and method of manufacturing an element substrate

• US 20050218926A1
• Filed: 03/30/2005
• Published: 10/06/2005
• Est. Priority Date: 05/15/2001
• Status: Active Grant

• Current Assignee: Masaaki Hiroki
• Original Assignee: Masaaki Hiroki
• Inventors: Hiroki, Masaaki
• Granted Patent: US 8,193,827 B2
• Time in Patent Office: Days
• US Class Current: 324/754.210
• CPC Class Codes: G01R 1/07 Non contact-making probes
• CPC Class Codes: G01R 19/0084 measuring voltage only all subgroups of G01R19/00 take precedence
• CPC Class Codes: G01R 31/01 Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station testing of cables continuously passing the testing apparatus G01R31/59; testing dielectric strength or breakdown voltage G01R31/12

Abstract

An inspection method which simplifies an inspection step by eliminating the need to set probes on wiring or probe terminals, and an inspection device for performing the inspection step. A voltage is applied to each of inspected circuits or circuit elements to operate the same. Signal processing is performed on an output from each inspected circuit or circuit element during operation to form a signal (operation information signal) including information on the operating condition of the circuit or the circuit element. The operation information signal is amplified and the amplitude of an alternating current voltage separately input is modulated with the amplified operation information signal. The voltage of the modulated alternating current is read in a non-contact manner to determine whether the corresponding circuit or circuit element is non-defective or defective.

Claims

1. A measuring method of a circuit or a circuit element, comprising:

operating the circuit or the circuit element by applying a voltage to the circuit or the circuit element in a non-contact manner, and

reading a voltage output from the circuit or the circuit element in a non-contact manner.

2. A measuring method according to claim 1, wherein the method is an inspecting method in which an operating condition of the circuit or the circuit element is inspected by using the voltage output from the circuit or the circuit element read by the measuring method.

3. A measuring method of a circuit or a circuit element, comprising:

operating the circuit or the circuit element by applying a voltage to the circuit or the circuit element in a non-contact manner;

forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element; and

reading a voltage of the modulated signal in a non-contact manner.

4. A method according to claim 3, wherein the method is an inspecting method in which the operating condition of the circuit or the circuit element is inspected by using the voltage of the modulated signal read by the measuring method.

5. An inspecting method of a circuit or a circuit element, comprising:

applying a first ac voltage between a pair of terminals of a first coil;

overlapping the first coil and a second coil with a certain spacing set therebetween;

forming a signal for operating the circuit or the circuit element from a second ac voltage generated between a pair of terminals of the second coil;

operating the circuit or the circuit element by inputting the signal to the circuit or the circuit element;

forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element;

applying the modulated signal between a pair of terminals of a third coil;

overlapping the third coil and a fourth coil with a certain spacing set therebetween; and

inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil.

6. An inspecting method according to claim 5, wherein a frequency of the third ac voltage is higher than that of the first ac voltage.

7. An inspecting method of inspecting a circuit or a circuit element, comprising:

applying a first ac voltage between a pair of terminals of a first coil;

overlapping the first coil and a second coil with a certain spacing set therebetween;

operating the circuit or the circuit element by rectifying a second ac voltage generated between a pair of terminals of the second coil or shaping a waveform of the second ac voltage and by applying the rectified or waveform-shaped voltage to the circuit or the circuit element;

forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element;

applying the modulated signal between a pair of terminals of a third coil;

overlapping the third coil and a fourth coil with a certain spacing set therebetween; and

inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil.

8. A method according to claim 7, wherein a frequency of the third ac voltage is higher than that of the first ac voltage.

9. An inspecting method of a circuit or a circuit element, comprising:

applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils;

overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween;

generating ac voltages differing in phase between pairs of terminals of the plurality of second coils;

generating dc voltages by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages;

applying a second ac voltage between a pair of terminals of a third coil;

overlapping the third coil and a fourth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the fourth coil;

modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage to the circuit or the circuit element;

applying the modulated ac voltage between a pair of terminals of a fifth coil;

overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the sixth coil; and

inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil.

10. An inspecting method according to claim 9, wherein the plurality of first coils, the third coil and the sixth coil are formed on a first insulating surface and the circuit or the circuit element, the plurality of second coils, the fourth coil and the fifth coil are formed on a second insulating surface.

11. An inspecting method according to claim 9, wherein a frequency of the second ac voltage is higher than that of the first ac voltage.

12. An inspecting method according to any one of claim 9, wherein the plurality of first coils, the plurality of second coils, the third coil, the fourth coil, the fifth coil and the sixth coil have wirings formed on one plane and the wirings have a spiral shape.

13. An inspecting method according to claim 10, wherein the distance between the first insulating surface and the second insulating surface is controlled by causing a fluid to flow between the first insulating surface and the second insulating surface.

14. An inspecting method of a circuit or a circuit element, comprising:

applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils;

overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween;

generating ac voltages differing in phase between pairs of terminals of the plurality of second coils;

generating a dc voltage by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages;

applying a second ac voltage between a pair of terminals of a third coil;

overlapping the third coil and a fourth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the fourth coil;

generating a voltage for driving the circuit or the circuit element by shaping the waveform of the ac voltage generated between the pair of terminals of the fourth coil;

applying a third ac voltage between a pair of terminals of a fifth coil;

overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the sixth coil;

modulating the ac voltage generated between the pair of terminals of the sixth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage and the voltage for driving the circuit and the circuit element to the circuit or the circuit element;

applying the modulated ac voltage between a pair of terminals of a seventh coil;

overlapping the seventh coil and a eighth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of the eighth coil; and

inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the eighth coil.

15. An inspecting method according to claim 14, wherein the plurality of first coils, the third coil, the fifth coil and the eighth coil are formed on a first insulating surface and the circuit or the circuit element, the plurality of second coils, the fourth coil, the sixth coil and the seventh coil are formed on a second insulating surface.

16. An inspecting method according to claim 14, wherein a frequency of the third ac voltage is higher than that of the first ac voltage or that of the second ac voltage.

17. An inspecting method according to any one of claim 14, wherein the plurality of first coils, the plurality of second coils, the third coil, the fourth coil, the fifth coil, the sixth coil, the seventh coil and the eighth coil have wirings formed on one plane and the wirings have a spiral shape.

18. A method according to claim 15, wherein the distance between the first insulating surface and the second insulating surface is controlled by causing a fluid to flow between the first insulating surface and the second insulating surface.

19. An inspecting method of a circuit or a circuit element, comprising:

applying a first ac voltage between a pair of terminals of a first coil;

overlapping the first coil and a second coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the second coil;

generating a voltage for driving the circuit or the circuit element by shaping the waveform of the ac voltage generated between the pair of terminals of the second coil;

applying a second ac voltage between a pair of terminals of a third coil;

overlapping the third coil and a fourth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the fourth coil;

modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the voltage for driving the circuit and the circuit element to the circuit or the circuit element;

applying the modulated ac voltage between a pair of terminals of a fifth coil;

overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;

generating an ac voltage between a pair of terminals of the sixth coil; and

inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil.

20. An inspecting method according to claim 19, wherein the first coils, the third coil and the sixth coil are formed on a first insulating surface and the circuit or the circuit element, the second coils, the fourth coil and the fifth coil are formed on a second insulating surface.

21. An inspecting method according to claim 19, wherein a frequency of the second ac voltage is higher than that of the first ac voltage.

22. An inspecting method according to claim 19, wherein the plurality of first coils, the plurality of second coils, the third coil, the fourth coil, the fifth coil and the sixth coil have wirings formed on one plane and the wirings have a spiral shape.

23. An inspecting method according to claim 20, wherein the distance between the first insulating surface and the second insulating surface is controlled by causing a fluid to flow between the first insulating surface and the second insulating surface.

24. A device for inspecting a circuit or a circuit element provided on an element substrate, the device comprising:

a first primary coil;

a second secondary coil;

means for overlapping the first primary coil and a first secondary coil provided on an element substrate with a certain spacing set between the first primary coil and the first secondary coil;

means for overlapping the second secondary coil and a second primary coil provided on the element substrate with a certain spacing set between the second secondary coil and the second primary coil;

means for applying an ac voltage between a pair of terminals of the first primary coil; and

means for inspecting an operating condition of the circuit or the circuit element through an ac voltage generated between a pair of terminals of the second secondary coil.

25. A device according to claim 24, wherein a distance between the first primary coil and the first secondary coil is controlled by causing a fluid to flow between the first primary coil and the first secondary coil.

26. A device according to claim 24, wherein a distance between the second primary coil and the second secondary coil is controlled by causing a fluid to flow between the second primary coil and the second secondary coil.

27. A method according to claim 24, wherein the first primary coil has wirings formed on one plane and the wirings have a spiral shape.

28. A method according to claim 24, wherein the second secondary coil has wirings formed on one plane and the wirings have a spiral shape.

29. A method according to claim 24, wherein the ac voltage generated between the pair of terminals of the second secondary coil includes information on the operating condition of the circuit or the circuit element or the location of a defective portion.

30. A device for inspecting a circuit or a circuit element provided on an element substrate, the device comprising:

a first primary coil;

a second secondary coil;

means for overlapping the first primary coil and a first secondary coil provided on the element substrate with a certain spacing set between the first primary coil and the first secondary coil;

means for overlapping the second secondary coil and a second primary coil provided on the element substrate with a certain spacing set between the second secondary coil and the second primary coil;

means for applying an ac voltage between a pair of terminals of the first primary coil;

means for amplifying or buffer-amplifying an ac voltage generated between a pair of terminals of the second secondary coil; and

means for inspecting the operating condition of the circuit or the circuit element through the ac voltage amplified or buffer-amplified.

31. A device according to claim 30, wherein a distance between the first primary coil and the first secondary coil is controlled by causing a fluid to flow between the first primary coil and the first secondary coil.

32. A device according to claim 30, wherein a distance between the second primary coil and the second secondary coil is controlled by causing a fluid to flow between the second primary coil and the second secondary coil.

33. A method according to claim 30, wherein the first primary coil has wirings formed on one plane and the wirings have a spiral shape.

34. A method according to claim 30, wherein the second secondary coil has wirings formed on one plane and the wirings have a spiral shape.

35. A method according to claim 30, wherein the ac voltage generated between the pair of terminals of the second secondary coil includes information on the operating condition of the circuit or the circuit element or the location of a defective portion.

36-44. -44. (canceled)

45. An article comprising:

a circuit or a circuit element;

means for applying a voltage to the circuit or the circuit element in a non-contact manner;

means for forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element;

means for outputting a voltage of the modulated signal in a non-contact manner.

46. An article according to claim 45, wherein the article is a semiconductor device.

47. An article according to claim 45, wherein the article is an element substrate.

48. An article comprising:

a circuit or a circuit element;

means for applying a voltage to the circuit or the circuit element in a non-contact manner by using a first coil;

means for forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element; and

means for outputting a voltage of the modulated signal in a non-contact manner by using a second coil.

49. An article according to claim 48, wherein the article is a semiconductor device.

50. An article according to claim 48, wherein the article is an element substrate.

51. An article comprising:

a circuit or a circuit element;

a first coil;

a second coil;

a third coil;

means for rectifying a first ac voltage generated between a pair of terminals of the first coil or shaping a waveform of the first ac voltage and for applying the rectified or waveform-shaped voltage to the circuit or the circuit element; and

means for forming a modulated signal by modulating a second ac voltage generated between a pair of terminals of the second coil with a voltage output from the circuit or the circuit element and for applying the modulated signal between a pair of terminals of the third coil.

52. An article according to claim 51, wherein the article is a semiconductor device.

53. An article according to claim 51, wherein the article is an element substrate.

54. An article comprising:

a circuit or a circuit element;

a plurality of first coils;

a second coil;

a third coil;

means for generating a dc voltage by rectifying first ac voltages generated between pairs of terminals of the plurality of first coils and by adding together the rectified voltages, and for applying the generated dc voltage to the circuit or the circuit element; and

means for forming a modulated signal by modulating a second ac voltage generated between a pair of terminals of the second coil with a voltage output from the circuit or the circuit element, and for applying the modulated signal between a pair of terminals of the third coil.

55. An article according to claim 54, wherein the article is a semiconductor device.

56. An article according to claim 54, wherein the article is an element substrate.

58. An article according to claim 54, wherein the article is a semiconductor device.

59. An article according to claim 54, wherein the article is an element substrate.

57. An article comprising:

a circuit or a circuit element;

a first coil;

a plurality of second coils;

a third coil;

a fourth coil;

means for rectifying a first ac voltage generated between a pair of terminals of the first coil or shaping a waveform of the voltage, and for applying the rectified or waveform-shaped voltage to the circuit or the circuit element;

means for generating a dc voltage by rectifying second ac voltages generated between pairs of terminals of the plurality of second coils and by adding together the rectified voltages, and for applying the generated dc voltage to the circuit or the circuit element; and

means for forming a modulated signal by modulating a third ac voltage generated between a pair of terminals of the third coil with a voltage output from the circuit or the circuit element, and for applying the modulated signal between a pair of terminals of the fourth coil.