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Electrostatic actuator

  • US 20050219017A1
  • Filed: 03/30/2005
  • Published: 10/06/2005
  • Est. Priority Date: 03/31/2004
  • Status: Active Grant
First Claim
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1. An electrostatic actuator in which a rocking plate is electrostatically attracted by an adsorption electrode provided on a substrate, the electrostatic actuator comprising:

  • a plurality of supporting columns, which are fixed on the substrate and arranged in a line, for pivotally supporting the rocking plate.

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