Lithographic apparatus and device manufacturing method
First Claim
1. A lithographic apparatus comprising:
- an illumination system that supplies a projection beam of radiation;
an array of individually controllable elements that impart the projection beam with a pattern;
a substrate table that supports a substrate during an exposure operation;
a projection system that projects the patterned beam onto a target portion of the substrate;
a control system that sends a control signal to set each of the individually controllable element in a given state; and
a compensation device that adjusts the control signal applied to a first individually controllable element in the array of individually controllable elements based on the control signal applied to at least one other individually controllable element.
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Accused Products
Abstract
A lithographic apparatus and method are used to pattern a substrate. The system and method includes an illumination system for supplying a projection beam of radiation, an array of individually controllable elements for imparting the projection beam with a pattern in its cross-section, and a substrate table for supporting the substrate during an exposure operation. A projection system projects the patterned beam onto a target portion of the substrate. A control system sends a control signal for setting each said individually controllable elements to a desired state. A compensation device for adjusting the control signal applied to a first individually controllable element based on the control signal to be applied to at least one other individually controllable element. This can be done to reduce image degradation arising from cross-talk between individually controllable elements.
35 Citations
14 Claims
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1. A lithographic apparatus comprising:
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an illumination system that supplies a projection beam of radiation;
an array of individually controllable elements that impart the projection beam with a pattern;
a substrate table that supports a substrate during an exposure operation;
a projection system that projects the patterned beam onto a target portion of the substrate;
a control system that sends a control signal to set each of the individually controllable element in a given state; and
a compensation device that adjusts the control signal applied to a first individually controllable element in the array of individually controllable elements based on the control signal applied to at least one other individually controllable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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- 12. A calibration method for an array of individually controllable elements in a lithographic apparatus, wherein a known control signal is applied to a first individually controllable element and the resulting disturbance of at least one other individually controllable element is recorded.
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14. A manufacturing method, comprising:
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using an array of individually controllable elements to impart a projection beam with a pattern in its cross-section;
projecting the patterned beam of radiation onto a target portion of a substrate;
applying a control signal to each of a plurality of the individually controllable elements to set each of the plurality of individually controllable elements in a desired state; and
adjusting the control signal applied to a first one of the plurality of individually controllable elements based on the control signal to be applied to at least one other individually controllable element.
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Specification