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Tip-tilt-piston actuator

  • US 20050219675A1
  • Filed: 03/31/2004
  • Published: 10/06/2005
  • Est. Priority Date: 03/31/2004
  • Status: Active Grant
First Claim
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1. A freely rotatable micromechanical plate apparatus, comprising:

  • at least three rotatable plates, each of said rotatable plates being suspended from a substrate via a respective first spring;

    a moveable plate;

    at least three moveable plate attachment points, each of said moveable plate attachment points being coupled to a respective one of said rotatable plates via respective ones of second springs so that rotation of each of said rotatable plates about a respective axis transfers motion to the moveable plate attachment points; and

    at least three posts, each of said posts coupling the movement of each of a respective one of said moveable plate attachment points to said moveable plate.

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