Bouncing mode operated scanning micro-mirror
First Claim
1. A MEMS apparatus for scanning an optical beam comprising:
- a. a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis; and
b. a bouncing mechanism operative to provide a bouncing event and to reverse said rotational motion, wherein said bouncing mechanism includes at least one first comb drive stator;
whereby said bouncing event provides said mirror with a piecewise linear response to actuation by intrinsically nonlinear forces.
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Accused Products
Abstract
A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.
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Citations
17 Claims
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1. A MEMS apparatus for scanning an optical beam comprising:
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a. a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis; and
b. a bouncing mechanism operative to provide a bouncing event and to reverse said rotational motion, wherein said bouncing mechanism includes at least one first comb drive stator;
whereby said bouncing event provides said mirror with a piecewise linear response to actuation by intrinsically nonlinear forces. - View Dependent Claims (2, 3, 4, 5)
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- 6. A MEMS apparatus for scanning an optical beam comprising a mirror operative to perform a tilting motion to a maximum tilting angle around a mirror rotation axis, the apparatus formed in a double active layer silicon-on-insulator (SOI) substrate.
- 11. A tilting micro-mirror formed in a double active layer silicon-on-insulator (SOI) substrate and actuated by a vertical comb drive formed in the same substrate.
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14. A method for controlling the path of a light beam reflected by a reflecting element formed in a double active layer silicon-on-insulator (SOI) substrate, the method comprising the steps of:
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a. providing at least one vertical comb drive formed in said double active layer SOI substrate; and
b. using said at least one vertical comb drive to tilt said reflecting element, thereby controlling said light beam path. - View Dependent Claims (15, 16, 17)
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Specification