Method and system for fastening components used in plasma processing
First Claim
1. A plasma processing tool comprising:
- a process chamber;
first and second components positioned within the process chamber; and
a fastening component configured to fasten said first and second components together, said fastening component comprising;
a first surface configured to be exposed to plasma processing performed in the plasma processing tool;
a second surface configured to contact the first component;
a stem extending from the second surface and configured to at least partially protrude through the first component and the second component; and
a locking pin extending from at least one side of the stem and configured to contact the second component such that the first and second components are fastened together between the second surface and locking pin, wherein at least one of the first surface, the second surface, the stem, and the locking pin is at least one of made of and coated with a material that is highly resistant to erosion resulting from plasma processing, and wherein said fastening component is not shielded from said plasma by a plasma shield component.
1 Assignment
0 Petitions
Accused Products
Abstract
A fastening component for fastening together a first component and a second component used in a plasma processing tool. The fastening component includes a first surface configured to be exposed to plasma processing performed in the plasma processing tool, and a second surface configured to contact the first component. Also included is a stem extending from the second surface and configured to at least partially protrude through the first component and the second component. The fastening component further includes a locking pin extending from at least one side of the stem and configured to contact the second component. The first surface, the second surface, the stem, and/or the locking pin are made of or coated with a material that is highly resistant to erosion resulting from plasma processing.
-
Citations
47 Claims
-
1. A plasma processing tool comprising:
-
a process chamber;
first and second components positioned within the process chamber; and
a fastening component configured to fasten said first and second components together, said fastening component comprising;
a first surface configured to be exposed to plasma processing performed in the plasma processing tool;
a second surface configured to contact the first component;
a stem extending from the second surface and configured to at least partially protrude through the first component and the second component; and
a locking pin extending from at least one side of the stem and configured to contact the second component such that the first and second components are fastened together between the second surface and locking pin, wherein at least one of the first surface, the second surface, the stem, and the locking pin is at least one of made of and coated with a material that is highly resistant to erosion resulting from plasma processing, and wherein said fastening component is not shielded from said plasma by a plasma shield component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 44)
-
-
8. A plasma processing tool comprising:
-
a process chamber;
first and second process chamber objects positioned within the process chamber;
a fastening system for fastening the first object to the second object, the fastening system comprising;
a first fastening component including a first contacting surface configured to contact the first object, a stem extending from the first surface, and a locking pin extending from at least one side of the stem; and
a second fastening component including a hole, a fastening surface configured to contact the locking pin, and a second contacting surface configured to contact the second object, wherein the stem, the locking pin, and the hole are configured such that the first object and the second object are fastened to each other when;
the locking pin protrudes through first object, the second object, and the hole, and the stem is rotated such that the locking pin contacts a locking area of the fastening surface, and wherein said fastening components are not shielded from said plasma by a plasma shield component. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 45)
-
-
23. A method for fastening a first plasma process chamber object to a second plasma process chamber object, comprising:
-
providing a fastening component with an exterior surface made out of a material that is highly resistant to erosion resulting from plasma processing, wherein the fastening component includes a first surface, a stem extending from the first surface, and a locking pin extending from at least one side of the stem, and is not shielded by a plasma shield for shielding the fastening component from a plasma within said process chamber;
inserting the stem and the locking pin through the first object and the second object; and
rotating the stem such that the locking pin contacts a second surface of the second object and such that the first object and the second object are fastened between the locking pin and the first surface. - View Dependent Claims (24, 25, 26, 27, 28, 29, 46)
-
-
30. A method for fastening a first plasma process chamber object to a second plasma process chamber object with a first fastening component and a second fastening component, comprising:
-
inserting the first fastening component through the first object, through at least a portion of the second object, and through the second fastening component;
rotating the first fastening component less than a full rotation such that the first fastening component contacts an outer surface of the second fastening component and such that the first object and the second object are fastened to each other, with at least one of the first fastening component and the second fastening component not shielded by a plasma shield; and
at least one of manufacturing and coating said at least one of the first fastening component and the second fastening component with a material that is highly resistant to erosion resulting from plasma processing. - View Dependent Claims (31, 32, 33, 34, 35, 36, 40, 41, 42, 43, 47)
-
- 37. (canceled)
Specification