Fabrication and use of superlattice
First Claim
Patent Images
1. A method for forming a superlattice comprising:
- forming a ridge over a substrate surface, the ridge comprising sidewalls that are disposed generally acutely relative to the substrate surface;
applying alternating layers of two or more materials over the ridge; and
removing part of the ridge and the alternating layers to expose edges of the alternating layers at the sidewalls of the ridge.
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Abstract
This disclosure relates to a system and method for fabricating and using a superlattice. A superlattice can be fabricated by applying alternating material layers on a ridge and then removing some of the alternating layers to expose edges. These exposed edges can be of nearly arbitrary length and curvature. These edges can be used to fabricate an array of nano-scale-width curved wires.
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Citations
57 Claims
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1. A method for forming a superlattice comprising:
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forming a ridge over a substrate surface, the ridge comprising sidewalls that are disposed generally acutely relative to the substrate surface;
applying alternating layers of two or more materials over the ridge; and
removing part of the ridge and the alternating layers to expose edges of the alternating layers at the sidewalls of the ridge. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method comprising:
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applying an etchable surface layer over a substrate;
applying a photoresist layer over the etchable surface layer of the substrate;
exposing parts of the photoresist layer to radiation to create a pattern in the photoresist layer;
removing an unpatterned portion of the photoresist layer;
altering a slope of sidewalls of the patterned photoresist layer; and
etching the photoresist layer and the etchable surface layer to remove the photoresist layer and portions of the etchable surface layer, leaving a sloped, patterned ridge of the etchable surface layer. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method comprising:
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applying alternating layers of two or more materials to a thickness between one and one hundred nanometers over a surface of a substrate having one or more non-linear ridges with generally sloped side walls; and
planarizing the ridges and the alternating layers to expose edges of the alternating layers at the side walls of the ridges. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A method comprising:
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shaping a surface layer on a substrate into an elongate ridge that extends along a long axis, the ridge being non-linear along the long axis and comprising a transverse cross section with generally sloped sidewalls and a top;
applying alternating layers of two or more materials to a thickness between one and one hundred nanometers over the ridge; and
removing the alternating layers from the top of the ridge to expose edges of the alternating layers. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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44. A superlattice comprising:
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multiple alternating layers comprising a first alternating layer of a first material and a second alternating layer of a second material, the multiple alternating layers having a surface exposing edges of the multiple alternating layers;
at least two of the edges of the first material layers being between one and one hundred nanometers wide, curved along their lengths, and co-parallel. - View Dependent Claims (45, 46, 47, 48, 49)
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50. A method comprising:
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providing a superlattice having an array of co-parallel, curved corrugations between about one and one hundred nanometers wide; and
forming an array of co-parallel, curved wires between about one and one hundred nanometers wide using the array of co-parallel, curved corrugations. - View Dependent Claims (51, 52, 53, 54, 55, 56, 57)
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Specification