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Fabrication and use of superlattice

  • US 20050221235A1
  • Filed: 04/02/2004
  • Published: 10/06/2005
  • Est. Priority Date: 04/02/2004
  • Status: Active Grant
First Claim
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1. A method for forming a superlattice comprising:

  • forming a ridge over a substrate surface, the ridge comprising sidewalls that are disposed generally acutely relative to the substrate surface;

    applying alternating layers of two or more materials over the ridge; and

    removing part of the ridge and the alternating layers to expose edges of the alternating layers at the sidewalls of the ridge.

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