Mount table, surface texture measuring machine and surface texture measuring method

• US 20050223579A1
• Filed: 04/05/2005
• Published: 10/13/2005
• Est. Priority Date: 04/08/2004
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Otsubo, Seiichi
• Granted Patent: US 7,194,818 B2
• Time in Patent Office: Days
• US Class Current: 33/502
• CPC Class Codes: G01B 21/047 Accessories, e.g. for positioning, for tool-setting, for measuring probes

Abstract

A mount table having a mount surface on which a workpiece as an object to be measured or worked includes a support unit for supporting the mount table so as to be floated from a surface plate so that the mount table can freely move or rotate on the surface plate finished to be plane or fixing and supporting the mount table on the surface plate and a plurality of artifact for measuring a plurality of attitudes on the mount table to detect the positions and rotations of the mount table in respective attitudes.

Claims

1. A mount table having a mount surface on which a workpiece as an object to be measured or worked is mounted, said mount table comprising:

a support unit that supports the mount table so as to float the mount table from a surface plate to freely move and rotate the mount table on the surface plate or that fixes and supports the mount table on the surface plate, and

a plurality of artifacts for measuring a plurality of attitudes of the mount table.

2. The mount table according to claim 1, wherein the plurality of the artifacts include at least reference balls or reference plates.

3. The mount table according to claim 1, wherein a relative position or a relative angle is already known for each of the plurality of the artifacts.

4. The mount table according to claim 1, wherein the plurality of the artifacts are provided at prescribed intervals in the periphery of the mount table.

5. The mount table according to claim 1, wherein the support unit is a static pressure fluid bearing having a pad to jet or suck at least fluid relative to the surface plate from the pad.

6. The mount table according to claim 1, wherein a sucking unit including a suction pad for sucking the workpiece is further provided on the mount surface.

7. The mount table according to claim 5, wherein the pad includes a porous material.

8. The mount table according to claim 6, wherein the suction pad includes a porous material.

9. The mount table according to claim 1, wherein the mount table includes a table main body and an installing part on which the plurality of the artifacts are installed, and the mount surface and the installing part can be at least, inclined, moved, rotated or lifted and lowered integrally relative to the table main body.

10. A surface texture measuring machine comprising:

a base having a flat upper surface;

a detector having a measuring member for measuring a workpiece;

a detector support mechanism for supporting the detector so as to be movable relative to the base;

a measuring device for measuring at least a position or an angle of the detector; and

the mount table according to claim 1,

wherein the mount table is mounted on the base as the surface plate.

11. The surface texture measuring machine according to claim 10, wherein in each of the plurality of attitudes of the mount table, the detector measures the artifacts, measures the workpiece as required and collects measured results.

12. The surface texture measuring machine according to claim 11, further comprising:

a data processor for respectively calculating the attitudes of the mount table relative to the base on the basis of the measured results of the artifacts, and connecting the measured results of the workpiece collected respectively in the attitudes on the basis of the calculated results of the attitudes of the mount table to form an integrated measured result.

13. The surface texture measuring machine according to claim 10, wherein the plurality of the artifacts are directly provided on the mount table.

14. A surface texture measuring method using the surface texture measuring machine according to claim 10, said surface texture measuring method comprising:

a positioning step of moving or rotating the mount table on which the workpiece is mounted on the base to position the mount table at a prescribed attitude;

a fixing step of fixing the mount table on the base at the prescribed attitude;

an artifact measuring step of measuring the plurality of artifacts that can be measured at the prescribed attitude to collect artifact measured data;

a workpiece measuring step of collecting the workpiece measured data of the workpiece at the prescribed attitude as required;

a repeating step of repeating the positioning step, the fixing step, the artifact measuring step and the workpiece measuring step as required;

a attitude calculating step of calculating respectively the attitudes of the mount table relative to the base on the basis of the artifact measured data; and

a workpiece measured data integrating step of connecting the workpiece measured data collected respectively in the attitudes on the basis of the calculated results of the attitudes of the mount table to form an integrated measured result.

15. The surface texture measuring method according to claim 14, wherein the positioning step including floating the mount table relative to the base by the supporting unit, moving or rotating the mount table under a floating state so that the mount table is placed at the prescribed attitude, and sucking the mount table on the base by the supporting unit in the prescribed attitude.