ROTATION-RATE SENSOR
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Accused Products
Abstract
A rotation-rate sensor includes a substrate and a centrifugal mass, in which a spiral spring device includes a bend in its anchoring region.
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Citations
22 Claims
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1-11. -11. (canceled)
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12. A micromechanical rotation-rate sensor comprising:
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a substrate;
an anchoring device provided on the substrate;
a spiral spring device; and
a centrifugal mass connected to the anchoring device via the spiral spring device connected to the centrifugal mass so that the centrifugal mass is elastically deflectable from its neutral position, about a rotational axis situated perpendicularly to a substrate surface and so that it is capable of rotary oscillation;
wherein the spiral spring device includes a bend at its anchoring region with the anchoring device. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification