Heating jacket for plasma etching reactor, and etching method using same
First Claim
1. A plasma etching reactor comprising a reaction chamber (1) surrounded by a leakproof wall (2), containing substrate support means (3), and communicating with a plasma source (4), is characterized in that it further comprises a heater liner (14) of an appropriate metal or alloy lining all or part of the leakproof wall (2) of the reaction chamber (1) in non-leakproof manner, and an intermediate thermal insulation space (15) provided between the heater liner (14) and the leakproof wall (2) of the reaction chamber (1).
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Accused Products
Abstract
In a reactor of the invention, the reaction chamber (1) is defined by a leakproof wall (2) protected by a heater liner (14). The heater liner (14) is raised to a temperature higher than the condensation temperature of the polymers that are generated during the passivation step of an alternating plasma etching method so as to avoid depositing polymer on the leakproof wall (2) of the reaction chamber (1) or on the heater liner (14) itself. As a result, etching speed is kept constant.
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Citations
18 Claims
- 1. A plasma etching reactor comprising a reaction chamber (1) surrounded by a leakproof wall (2), containing substrate support means (3), and communicating with a plasma source (4), is characterized in that it further comprises a heater liner (14) of an appropriate metal or alloy lining all or part of the leakproof wall (2) of the reaction chamber (1) in non-leakproof manner, and an intermediate thermal insulation space (15) provided between the heater liner (14) and the leakproof wall (2) of the reaction chamber (1).
Specification