Dynamically balanced substrate carrier handler
First Claim
1. An apparatus comprising:
- a frame;
a substrate carrier handler coupled to the frame, the substrate carrier handler comprising an end effector adapted to move a substrate carrier to or from a conveyor adapted to transport substrate carriers, the substrate carrier handler being further adapted to accelerate while moving the substrate carrier to or from the conveyor, and by said acceleration to impose a first inertial load on the frame; and
a moveable balancing mass coupled to the frame and adapted to accelerate when the end effector accelerates so as to substantially cancel the first inertial load, thereby reducing a vibration that would occur absent the balancing mass.
1 Assignment
0 Petitions
Accused Products
Abstract
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.
25 Citations
43 Claims
-
1. An apparatus comprising:
-
a frame;
a substrate carrier handler coupled to the frame, the substrate carrier handler comprising an end effector adapted to move a substrate carrier to or from a conveyor adapted to transport substrate carriers, the substrate carrier handler being further adapted to accelerate while moving the substrate carrier to or from the conveyor, and by said acceleration to impose a first inertial load on the frame; and
a moveable balancing mass coupled to the frame and adapted to accelerate when the end effector accelerates so as to substantially cancel the first inertial load, thereby reducing a vibration that would occur absent the balancing mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
-
-
30. A substrate transport system comprising:
-
a conveyor adapted to transport a substrate carrier in a substantially horizontal direction; and
an apparatus adjacent the conveyor comprising;
a frame;
a substrate carrier handler coupled to the frame, the substrate carrier handler comprising an end effector adapted to move a substrate carrier to or from a conveyor adapted to transport substrate carriers, the substrate carrier handler being adapted to accelerate while moving the substrate carrier to or from the conveyor, and by said acceleration to impose a first inertial load on the frame; and
a moveable balancing mass coupled to the frame and adapted to accelerate when the end effector accelerates so as to substantially cancel the first inertial load, thereby reducing a vibration that would occur absent the balancing mass. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37)
-
-
38. A substrate carrier handler, comprising:
-
a horizontal guide;
an end effector mounted for horizontal movement along the horizontal guide, adapted to accelerate along the horizontal guide while moving a substrate carrier, and by said acceleration to impose a first inertial load on the horizontal guide; and
a moveable balancing mass coupled to the horizontal guide and adapted to accelerate when the end effector accelerates so as to substantially cancel the first inertial load, thereby reducing a vibration that would occur absent the balancing mass. - View Dependent Claims (39, 40, 41, 42)
-
-
43. A method comprising:
-
accelerating an end effector of a substrate carrier handler in a first direction along a frame, thereby imposing a first inertial load on the frame; and
accelerating a dummy mass in a second direction, opposite to the first direction, thereby imposing a second inertial load on the frame;
wherein the acceleration and weight of the dummy mass are such that the first and second inertial loads substantially cancel each other.
-
Specification