Method and system for fabricating integrated circuit chips with unique identification numbers
First Claim
1. An system for writing data to integrated circuit (IC) chips of a wafer, comprising:
- a charged particle source that supplies a beam of charged particles;
a beam column; and
a wafer plate that mounts a wafer having an array of integrated circuits each including a plurality of transistors;
wherein the beam column receives the beam of charged particles and selectively passes the beam of charged particles to the surface of the wafer;
wherein the selectively passed beam of charged particles irradiates selected transistors of said plurality of transistors to cause said selected transistors to each permanently enter a desired state, wherein said plurality of transistors for each integrated circuit of said array includes at least one of said selected transistors, wherein a combination of states of said plurality of transistors of an integrated circuit corresponds to data for said integrated circuit.
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Accused Products
Abstract
A method, system, and apparatus for writing data to integrated circuits is described. A charged particle source supplies a beam of charged particles. A wafer plate mounts a wafer having a plurality of transistors distributed among an array of integrated circuits on a surface. A beam column receives the beam of charged particles and selectively passes the beam of charged particles to the surface of the wafer. The selectively passed beam of charged particles irradiates selected transistors of the plurality of transistors to cause the selected transistors to permanently change from a first state to a second state. The second state can be a fully “on” state, a fully “off” state, or a state in between for the selected transistors. Each integrated circuit of the array includes at least one of the selected transistors and at least one non-selected transistor. A combination of selected and non-selected transistors of the integrated circuit corresponds to data for the integrated circuit.
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Citations
47 Claims
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1. An system for writing data to integrated circuit (IC) chips of a wafer, comprising:
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a charged particle source that supplies a beam of charged particles;
a beam column; and
a wafer plate that mounts a wafer having an array of integrated circuits each including a plurality of transistors;
wherein the beam column receives the beam of charged particles and selectively passes the beam of charged particles to the surface of the wafer;
wherein the selectively passed beam of charged particles irradiates selected transistors of said plurality of transistors to cause said selected transistors to each permanently enter a desired state, wherein said plurality of transistors for each integrated circuit of said array includes at least one of said selected transistors, wherein a combination of states of said plurality of transistors of an integrated circuit corresponds to data for said integrated circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for writing data to an (IC) chip having a plurality of transistors, comprising:
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generating a beam of charged particles; and
directing the beam at a transistor of the IC chip, comprising the step of implanting charged particles of the beam in the transistor to cause current flow through the transistor during operation of the transistor to be altered to cause the transistor to permanently enter a desired state. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for writing data to integrated circuits of a wafer, comprising:
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generating a beam of charged particles; and
directing the beam at a wafer having a surface comprising an array of integrated circuits each having a plurality of transistors, comprising the step of implanting charged particles of the beam in selected transistors of the plurality of transistors to cause the selected transistors to each permanently enter a desired state;
wherein the plurality of transistors of each integrated circuit of the array includes at least one of the selected transistors, wherein a combination of states of the plurality of transistors of an integrated circuit corresponds to data for the integrated circuit. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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Specification