Precision measuring gauges with optical fiber output channels
First Claim
1. A precision fiber-optic gauge that senses displacement of a scale grating and outputs all-optical displacement measuring signals, the gauge comprising:
- a first member;
a scale grating coupled to a second member that is movable along a measuring axis relative to the first member; and
a fiber-optic readhead coupled to the first member and arranged in an operable position relative to the scale grating, the readhead transmitting light to the scale grating, the readhead comprising at least two fiber-optic detector channels for receiving and spatially filtering light from the scale grating to sense the displacement of the scale grating and outputting all-optical measuring signals based on the received light;
wherein the gauge outputs all-optical measuring signals.
1 Assignment
0 Petitions
Accused Products
Abstract
All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10-50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.
-
Citations
64 Claims
-
1. A precision fiber-optic gauge that senses displacement of a scale grating and outputs all-optical displacement measuring signals, the gauge comprising:
-
a first member;
a scale grating coupled to a second member that is movable along a measuring axis relative to the first member; and
a fiber-optic readhead coupled to the first member and arranged in an operable position relative to the scale grating, the readhead transmitting light to the scale grating, the readhead comprising at least two fiber-optic detector channels for receiving and spatially filtering light from the scale grating to sense the displacement of the scale grating and outputting all-optical measuring signals based on the received light;
wherein the gauge outputs all-optical measuring signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
-
-
62. A method for operating a precision fiber-optic gauge that senses displacement of a scale grating and outputs all-optical displacement measuring signals, the gauge comprising:
-
a first member;
a scale grating coupled to a second member that is movable along a measuring axis relative to the first member; and
a fiber-optic readhead coupled to the first member and arranged in an operable position relative to the scale grating, the readhead transmitting light to the scale grating, the readhead comprising at least two fiber-optic detector channels for receiving and spatially filtering light from the scale grating to sense the displacement of the scale grating and outputting all-optical measuring signals based on the received light;
the method comprising;
(a) operably positioning the fiber-optic readhead relative to the scale grating; and
(b) inputting light arising from the scale grating to the fiber-optic readhead; and
(c) producing all-optical measuring signals from the fiber-optic readhead. - View Dependent Claims (63, 64)
-
Specification