Honeycomb optical window deposition shield and method for a plasma processing system
First Claim
1. An optical window deposition shield comprising:
- a backing plate having a through hole;
a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell; and
a coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate.
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Accused Products
Abstract
An optical window deposition shield including a backing plate having a through hole, and a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure. Each cell of the honeycomb structure has an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell. A coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate. The optical window deposition shield shields the optical viewing window of a plasma processing apparatus from contact with the plasma.
13 Citations
41 Claims
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1. An optical window deposition shield comprising:
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a backing plate having a through hole;
a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell; and
a coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An optical window deposition shield comprising:
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a honeycomb structure planar sheet having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell; and
a clip device configured to hold opposing ends of the honeycomb planar sheet together to form a substantially continuous liner of honeycomb material configured to line the chamber wall of a plasma processing chamber.
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21. A plasma processing chamber comprising:
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a chamber wall having an optical viewing window;
a chamber liner having a hole that is substantially aligned with said viewing window to permit viewing an interior of the chamber through the viewing window and hole; and
an optical window deposition shield substantially aligned with said viewing window and liner hole, the optical viewing window deposition shield comprising;
a backing plate having a through hole;
a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell; and
a coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. An optical window deposition shield comprising:
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means for impeding processing plasma from traveling into contact with a viewing window of a plasma chamber; and
means for holding the means for impeding within an opening of a chamber liner used in the plasma chamber.
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41. A method for impeding a processing plasma from traveling into contact with a viewing window of a plasma chamber, the method comprising;
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providing a mounting hole in a liner of the plasma chamber; and
fixedly mounting a honeycomb structure within the mounting hole, said honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure, each cell having an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell.
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Specification