Self-aligned microlens array for transmissive MEMS image arrray
First Claim
1. An optical device, comprising:
- a substrate having a plurality of channels therethrough;
a plurality of shutters, with respective shutters associated with respective channels in the substrate; and
a plurality of lenses, each lens having a body portion and a head portion, with respective body portions of the lenses disposed in respective channels of the substrate.
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Accused Products
Abstract
A MEMS optical device includes a MEMS image array and a self-aligned microlens array. The MEMS image array includes a number of individual channels. The microlens array includes individual microlenses, each of which is associated with one of the channels of the MEMS image array. The microlens array is formed directly on the MEMS image array using semiconductor fabrication techniques. Each microlens is automatically aligned with its respective channel within the image array. The need for precise and expensive manual alignment of the MEMS image array and the microlens arrays is avoided. Improvements in the fill factor and the transmission efficiency of the optical device are realized. Further, by tailoring the refractive index of the lens relative to both the substrate and the ambient air, the total internal reflection phenomenon can be exploited, for additional improvement in the transmission efficiency of the optical device.
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Citations
27 Claims
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1. An optical device, comprising:
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a substrate having a plurality of channels therethrough;
a plurality of shutters, with respective shutters associated with respective channels in the substrate; and
a plurality of lenses, each lens having a body portion and a head portion, with respective body portions of the lenses disposed in respective channels of the substrate. - View Dependent Claims (2, 3, 4, 5)
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6. A method, comprising:
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forming a substrate with a plurality of channels therethrough; and
forming a lens array on the substrate with each lens self-aligned with a respective channel in the substrate. - View Dependent Claims (7, 8, 9, 10)
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11. A method, comprising:
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depositing an oxide film on a substrate, the substrate having a plurality of channels, wherein the oxide film fills the plurality of channels from a first end to a second end and accumulates outside the second end of the substrate; and
positioning a plurality of masks over the oxide film, wherein each mask is disposed over one of the plurality of channels, the plurality of masks being graded in a convex shape. - View Dependent Claims (12)
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13. A method, comprising:
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depositing a nitride film on an image array, the image array comprising a substrate with a plurality of channels, wherein the nitride film fills the plurality of channels and accumulates outside the image array; and
positioning a plurality of masks over the nitride film, wherein each mask is disposed over one of the plurality of channels, the plurality of masks being graded in a convex shape. - View Dependent Claims (14)
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15. An optical device, comprising:
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a diffraction grating, comprising a plurality of channels disposed within a substrate, the channels having a predetermined shape; and
a microlens array, comprising a plurality of microlenses, wherein each microlens comprises a head portion and a body portion, the head portion being convex and the body portion having the predetermined shape, the microlens array being self-aligned with the diffraction grating;
wherein the body portion of each microlens of the plurality of microlenses fits into one of the plurality of channels and the head portion of each microlens of the plurality of microlenses extends outside a second end of the substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A system, comprising:
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a light source; and
an image array positioned to receive light from the light source, wherein the image array includes a self-aligned microlens array formed thereon. - View Dependent Claims (25, 26, 27)
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Specification