Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system
First Claim
1. An apparatus for evaluating characteristics of a sample comprising:
- an intensity modulated pump laser beam;
optics for focusing the pump laser beam onto the surface of the sample to periodically excite the sample;
a probe laser beam directed to reflect off the periodically excited sample;
a photodetector for monitoring the modulated changes in reflected probe resulting from the periodic excitation of the sample and generating first output signals;
an infrared detector for monitoring modulated changes in the infrared radiation emitted from the sample resulting from the periodic excitation of the sample and generating second output signals; and
a processor for receiving the first and second output signals and for using at least one of said first and second output signals to evaluate the sample.
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Abstract
A method and apparatus for evaluating a semiconductor wafer. A combination of a photothermal modulated reflectance method and system with a photothermal IR radiometry system and method is utilized to provide information which can be used to determine properties of semiconductor wafers being evaluated. The system and method can provide for utilizing a common probe source and a common intensity modulated energy source. The system and method further provide an infrared detector for monitoring changes in infrared radiation emitted from a sample, and photodetector for monitoring changes in beam reflected from the sample.
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Citations
10 Claims
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1. An apparatus for evaluating characteristics of a sample comprising:
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an intensity modulated pump laser beam;
optics for focusing the pump laser beam onto the surface of the sample to periodically excite the sample;
a probe laser beam directed to reflect off the periodically excited sample;
a photodetector for monitoring the modulated changes in reflected probe resulting from the periodic excitation of the sample and generating first output signals;
an infrared detector for monitoring modulated changes in the infrared radiation emitted from the sample resulting from the periodic excitation of the sample and generating second output signals; and
a processor for receiving the first and second output signals and for using at least one of said first and second output signals to evaluate the sample. - View Dependent Claims (2, 3)
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4. A method of evaluating the characteristics of a sample comprising:
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periodically exciting the surface of the sample;
monitoring the modulated changes in reflectivity at the surface of the sample resulting from the periodic excitation of the sample and generating first output signals;
monitoring the modulated changes in the infrared radiation emitted from the sample resulting from the periodic excitation of the sample and generating second output signals; and
evaluating the sample based on the combination of the first and second output signals. - View Dependent Claims (5, 6, 7, 8, 9, 10)
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Specification