Method of improving the performance of microstructures
First Claim
1. A method for improving the performance of a device having a movable microstructure that comprises an element that plastically deforms and operates in a first deformed state and a second state, the method comprising:
- repeatedly actuating the element to the first deformed state;
or holding the element at the first deformed state for a particular time period so as to cause the element to acquire an amount of plastic deformation that is at least 1.5% of a predetermined maximum plastic deformation that can be developed during the operation of the element; and
delivering the device to a customer.
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Accused Products
Abstract
A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.
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Citations
85 Claims
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1. A method for improving the performance of a device having a movable microstructure that comprises an element that plastically deforms and operates in a first deformed state and a second state, the method comprising:
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repeatedly actuating the element to the first deformed state;
or holding the element at the first deformed state for a particular time period so as to cause the element to acquire an amount of plastic deformation that is at least 1.5% of a predetermined maximum plastic deformation that can be developed during the operation of the element; and
delivering the device to a customer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for improving the performance of a device having a movable microstructure that comprises an element that plastically deforms and operates in a first deformed state and a second state, the method comprising:
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predetermining an amount of desired plastic deformation of the element at a non-actuated state;
repeatedly actuating the element to a first deformed state;
or holding the element at the first deformed state for a particular time period so as to cause the element to acquire the desired amount of plastic deformation at the non-actuated state; and
delivering the device to a customer. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 59, 60, 61, 62)
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46. A method for improving the performance of a device having a movable microstructure that comprises an element that plastically deforms and operates in a first deformed state and a second state, the method comprising:
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acquiring an amount of plastic deformation, comprising;
repeatedly actuating the element to the first deformed state;
or holding the element at the first deformed state for a time period of 1 hour or more so as to cause the element to acquire an amount of plastic deformation; and
shipping the device to a customer. - View Dependent Claims (47, 48, 50, 51, 52, 53, 57, 58, 63, 64, 65, 66)
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54. The method of claim 49, wherein the initial amount of the plastic deformation is at least 3% or more of the maximum plastic deformation.
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55. The method of claim 49, wherein the initial amount of the plastic deformation is at least 5% or more of the maximum plastic deformation.
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56. The method of claim 49, wherein the initial amount of the plastic deformation is at least 60% or more of the maximum plastic deformation.
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67. A method of improving the lifetime of a spatial light modulator having an array of micromirrors, wherein the micromirror has a reflective mirror plate attached to a hinge such that the mirror plate can rotate between an ON and OFF state, the method comprising:
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acquiring an amount of plastic deformation for the deformable element;
defining a new OFF state according to the original OFF state and the acquired plastic deformation; and
operating the microstructure at the new OFF state and the ON state. - View Dependent Claims (68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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Specification