Controller and method to mediate data collection from smart sensors for fab applications
First Claim
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1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:
- identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;
recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and
receiving from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.
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Abstract
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
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Citations
50 Claims
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1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:
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identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;
recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and
receiving from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context. - View Dependent Claims (2, 3)
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4. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:
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identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to reduce data sensed from one or more semiconductor manufacturing devices, based on the context descriptions;
recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and
receiving from the particular smart sensors reduced data sensed by the smart sensors, responsive to the transmitted current context. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:
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identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to calibrate their sensing of data from one or more semiconductor manufacturing devices, based on the context descriptions;
recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and
receiving from the particular smart sensors data sensed by the smart sensors, calibrated responsive to the transmitted current context. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A controller adapted to monitoring processes or equipment performance in a semiconductor manufacturing operation, the controller including:
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a processor;
memory coupled to the processor;
one or more ports coupled to the processor, adapted to communicate with smart sensors; and
logic and resources operable with the processor, adapted to identify a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;
recognize a current context of operation of a particular semiconductor manufacturing device;
transmit to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and
receive from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.
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25. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:
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receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
analyzing at the controller the reduced data, responsive to the current context, and determining that additional detail should be requested; and
transmitting a request for the additional detail from the data sensed by at least one specific smart sensor. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33)
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34. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:
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a processor;
memory coupled to the processor;
one or more ports coupled to the processor, adapted to communicate with smart sensors; and
logic and resources operable with the processor, adapted to receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
analyze the reduced data, responsive to the current context, and determine that additional detail should be requested; and
transmit to at least one specific smart sensor a request for the additional detail from the data sensed.
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35. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:
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receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
providing a data user at least some of the reduced data and receiving from the data user an inquiry for additional detail; and
transmitting to at least one specific smart sensor a request for the additional detail from the data sensed.
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36. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:
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a processor;
memory coupled to the processor;
one or more ports coupled to the processor, adapted to communicate with smart sensors and a data user; and
logic and resources operable with the processor, adapted to receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
provide the data user at least some of the reduced data and receive from the data user an inquiry for additional detail; and
transmit to at least one specific smart sensor a request for the additional detail from the data sensed.
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37. A controller-aided method of controlling equipment performance monitoring in a semiconductor manufacturing operation, the method including:
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identifying to a controller capabilities of at least one smart sensor that is adapted to recognize a plurality of context descriptions; and
to adapt its sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;
receiving at the smart sensor from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and
transmitting to the controller data sensed by the smart sensor, responsive to the received current context. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A smart sensor adapted to monitoring equipment performance in a semiconductor manufacturing operation, the smart sensor including:
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a processor;
memory coupled to the processor;
one or more ports coupled to the processor, adapted to communicate with at least one controller; and
logic and resources operable with the processor, adapted to recognize a plurality of context descriptions and to adapt the smart sensor'"'"'s sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;
receive from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and
transmit to the controller data sensed by the smart sensor, responsive to the received current context. - View Dependent Claims (49, 50)
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Specification