Coupling apparatus for inertial sensors
First Claim
1. Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:
- a bar coupled between first and second sensor element frames; and
at least one supporting structure supporting the bar, the at least one structure coupled to a substrate underlying the frames, the structures allowing the bar to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames.
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Accused Products
Abstract
A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
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Citations
18 Claims
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1. Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:
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a bar coupled between first and second sensor element frames; and
at least one supporting structure supporting the bar, the at least one structure coupled to a substrate underlying the frames, the structures allowing the bar to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:
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coupling means for coupling first and second sensor element frames; and
supporting means for supporting the coupling means, the supporting means coupled to a substrate underlying the frames, the supporting means allowing the coupling means to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification