Inertial sensor with a linear array of sensor elements
First Claim
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1. An inertial sensor comprising:
- at least one substrate; and
at least two pairs of sensor elements configured in a linear array substantially in a plane above the at least one substrate, each pair of sensor elements including;
a first sensor element having a first resonator suspended within a first frame; and
a second sensor element having a second resonator suspended within a second frame, wherein;
all of the frames are substantially aligned along a first axis in the plane and the frames of each pair are configured to move in anti-phase to one another along parallel axes in the plane normal to the first axis.
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Abstract
An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to move in anti-phase to one another along parallel axes but are substantially prevented from moving in phase with one another.
112 Citations
21 Claims
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1. An inertial sensor comprising:
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at least one substrate; and
at least two pairs of sensor elements configured in a linear array substantially in a plane above the at least one substrate, each pair of sensor elements including;
a first sensor element having a first resonator suspended within a first frame; and
a second sensor element having a second resonator suspended within a second frame, wherein;
all of the frames are substantially aligned along a first axis in the plane and the frames of each pair are configured to move in anti-phase to one another along parallel axes in the plane normal to the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An inertial sensor comprising:
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at least one substrate; and
at least two pairs of sensor elements configured in a linear array substantially in a plane above the at least one substrate, each pair of sensor elements including;
a first sensor element having a first resonator suspended within a first frame; and
a second sensor element having a second resonator suspended within a second frame, wherein;
all of the frames are substantially aligned along a first axis in the plane, and wherein the inertial sensor further comprises means for operating the frames of each pair of sensor elements in anti-phase to one another along parallel axes in the plane normal to the first axis. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification