MEM structure having reduced spring stiction

• US 20050229706A1
• Filed: 04/20/2004
• Published: 10/20/2005
• Est. Priority Date: 04/20/2004
• Status: Active Grant

• Current Assignee: North Star Innovations Inc. (Wi-LAN Inc.)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Vandemeer, Jan E., Gogoi, Bishnu P., Hammond, Jonathan H.
• Granted Patent: US 7,000,473 B2
• Time in Patent Office: Days
• US Class Current: 73/514.380
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 3/001 Structures having a reduced contact area, e.g. with bumps or with a textured surface
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A micro-electromechanical (MEM) device has a folded tether spring in which each fold of the spring is surrounded by a rigidly fixed inner structure and outer structure. The fixed inner structure increases restoring force of the spring. The rigidly fixed inner and outer structures each have a major surface that include a plurality of notches of fixed width relative to a distance between the major surface and the spring. Additionally in one form extensions from the major surface of the rigidly fixed inner and outer structures are provided at distal ends thereof to make initial contact with the spring. The notches of the MEM device both reduce surface area contact with the spring and wick moisture away from the spring to minimize stiction.

Claims

1. A micro-electromechanical (MEM) structure comprising:

a proof mass movable with respect to a substrate;

a spring anchor rigidly coupled to the substrate;

a tether spring, the proof mass physically coupled to the spring anchor via the tether spring, wherein the tether spring includes a wall with a height; and

a first structure rigidly coupled to the substrate, the first structure including a first major surface facing the wall of the tether spring, wherein the first major surface includes a plurality of notches.

2. The MEM structure of claim 1 wherein:

the tether spring includes a first portion and a second portion in a folded configuration; and

the first structure includes at least a portion located between the first portion and the second portion.

3. The MEM structure of claim 2 wherein:

the wall is located on the first portion;

the second portion includes a second wall, and

the first structure includes a second major surface, the second major surface including a second plurality of notches, the second major surface facing the second wall.

4. The MEM structure of claim 3 wherein:

the first portion further includes a third wall located on the first portion, the third wall being on an opposite side of the wall that faces the first structure; and

the MEM structure further includes a third major surface of a structure rigidly coupled to the substrate, the third major surface facing the third wall, the third major surface including a third plurality of notches.

5. The MEM structure of claim 4 wherein:

the second portion includes a fourth wall on an opposite side of the second portion from the second wall; and

the MEM structure further includes a fourth major surface of a structure rigidly coupled to the substrate, the fourth major surface facing the fourth wall, the fourth major surface including a fourth plurality of notches.

6. The MEM structure of claim 3 wherein the first major surface and the second major surface are generally parallel to each other.

7. The MEM structure of claim 1 wherein:

the wall is located on a side of a portion of the tether spring;

the portion of the tether spring includes a second wall on an opposite side of the wall; and

the MEM structure further includes a second major surface of a structure rigidly coupled to the substrate, the second major surface facing the second wall, the second major surface including a second plurality of notches.

8. The MEM structure of claim 1 wherein the proof mass, the tether spring, and the first structure are each made of a first material.

9. The MEM structure of claim 8 wherein the first material includes epitaxial silicon.

10. The MEM structure of claim 1 wherein the plurality of notches are located in a first direction along the first major surface spaced apart at generally a first interval.

11. The MEM structure of claim 10 wherein the first major surface extends in the first direction a first distance, wherein the plurality of notches occupy at least a majority of the first distance of the first major surface.

12. The MEM structure of claim 1 wherein each notch of the plurality of notches is spaced along the first major surface in a first direction and separated by at least a first distance from an adjacent notch of the plurality of notches, wherein each of the plurality of notches has a width in the first direction that is equal to or less than the first distance.

13. The MEM structure of claim 1 wherein the first major surface is located at a first distance from the wall while the tether spring is in a zero force position, wherein each notch of the plurality of notches has a width generally equal to or less than the first distance.

14. The MEM structure of claim 1 wherein the first structure includes an extension extending from the first major surface towards the wall.

15. The MEM structure of claim 14 wherein:

the tether spring includes a first portion and a second portion in a folded configuration, the tether spring also includes a folded end portion connecting the first portion and the second portion at a distal end of the tether spring; and

the extension is located in relative proximity to the distal end.

16. The MEM structure of claim 14 wherein:

each notch of the plurality of notches has a depth from the first major surface;

the extension extends out to a second distance from the first major surface; and

the second distance is less than the depth of each notch of the plurality of notches.

17. The MEM structure of claim 1 wherein each notch of the plurality of notches has a width generally equal to or less than two microns.

18. The MEM structure of claim 1 wherein the MEM structure is implemented in an accelerometer.

20. The MEM structure of claim 1 wherein the proof mass and spring are characterized as having a high aspect ratio.

19. (canceled)

21. A micro-electromechanical (MEM) structure comprising:

a proof mass movable with respect to a substrate;

a spring anchor rigidly coupled to the substrate;

a tether spring, the proof mass physically coupled to the spring anchor via the tether spring, wherein the tether spring includes a first portion and a second portion in a folded configuration; and

a first structure rigidly coupled to the substrate, the first structure includes at least a portion located between the first portion and the second portion, the first structure including a first major surface facing a first wall of the first portion, the first structure including a second major surface facing a second wall of the second portion, the first major surface comprises a first plurality of notches, the second major surface comprises a second plurality of notches.

22. The MEM structure of claim 21 wherein:

the first structure comprises a first extension extending from the first major surface towards the first wall of the first portion; and

the first structure comprises a second extension extending from the second major surface towards the second wall of the second portion.

23. The MEM structure of claim 21 wherein:

the first major surface is located at a first distance from the first wall while the spring is in a zero force position, wherein each notch of the first plurality of notches has a width substantially equal to or less than the first distance; and

the second major surface is located at a second distance from the second wall while the tether spring is in a zero force position, wherein each notch of the second plurality of notches has a width substantially equal to or less than the second distance.

24. The MEM structure of claim 21 wherein:

each notch of the first plurality of notches is spaced along the first wall and separated by at least a first distance from an adjacent notch of the first plurality of notches, and each notch of the first plurality of notches has a lateral width that is equal to or less than the first distance.

25. A micro-electromechanical (MEM) structure comprising:

a proof mass located above a substrate and movable with respect to the substrate;

a spring anchor located above the substrate and rigidly coupled to the substrate;

a tether spring integrally formed with the proof mass, the proof mass physically coupled to the spring anchor via the tether spring, the tether spring comprising an elongated portion having a vertical wall; and

a first structure rigidly coupled to the substrate, the first structure including a first major vertical surface facing the vertical wall of the tether spring, wherein the first major vertical surface includes a plurality of vertically oriented notches, each notch of the plurality of vertically oriented notches is laterally spaced along the vertical wall and separated by at least a first distance from an adjacent notch of the plurality of vertically oriented notches, wherein each notch of the plurality of vertically oriented notches has a lateral width that is equal to or less than the first distance.

26. The MEM structure of claim 25 wherein:

the vertical wall is laterally located a second distance from the first major vertical surface when the tether spring is in a zero force position; and

wherein the lateral width of each notch of the plurality of vertical oriented notches is less than the second distance.

27. The MEM structure of claim 25 wherein the first structure comprises a first extension laterally extending from the first major vertical surface towards the vertical wall.