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Fluid controller

  • US 20050229972A1
  • Filed: 04/23/2002
  • Published: 10/20/2005
  • Est. Priority Date: 03/05/2001
  • Status: Active Grant
First Claim
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1. A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage, the fluid control apparatus being characterized in that at least one of the lines (A), (B) is provided on each of opposite sides thereof with a tape heater (11), a space for positioning a tape heater holding clip (13) therein being provided in each of locations between adjacent fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19), the tape heaters (11) being held from opposite sides thereof to the line (A, B) by the clip (13), the line (A, B) provided with the heaters being mounted on a line support member (10) removably attached to the base member (1).

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