Fluid controller
First Claim
1. A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage, the fluid control apparatus being characterized in that at least one of the lines (A), (B) is provided on each of opposite sides thereof with a tape heater (11), a space for positioning a tape heater holding clip (13) therein being provided in each of locations between adjacent fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19), the tape heaters (11) being held from opposite sides thereof to the line (A, B) by the clip (13), the line (A, B) provided with the heaters being mounted on a line support member (10) removably attached to the base member (1).
1 Assignment
0 Petitions
Accused Products
Abstract
Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.
432 Citations
6 Claims
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1. A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage,
the fluid control apparatus being characterized in that at least one of the lines (A), (B) is provided on each of opposite sides thereof with a tape heater (11), a space for positioning a tape heater holding clip (13) therein being provided in each of locations between adjacent fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19), the tape heaters (11) being held from opposite sides thereof to the line (A, B) by the clip (13), the line (A, B) provided with the heaters being mounted on a line support member (10) removably attached to the base member (1).
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2. A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage,
the fluid control apparatus being characterized in that each of the lines (A), (B) is mounted on a line support member (10) removably attached to the base member (1), the line support member (10) having a heater insertion bore (14) formed therein and extending longitudinally thereof, a sheath heater (12) being inserted into the bore (14).
Specification