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Fabrication and integration of polymeric bioMEMS

  • US 20050230767A1
  • Filed: 12/03/2004
  • Published: 10/20/2005
  • Est. Priority Date: 12/05/2003
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical system (MEMS) device, comprising:

  • a substrate;

    a patterned structure on the substrate, the patterned structure having a microchannel; and

    an encapsulation membrane covering the microchannel, the encapsulation membrane being reversibly attachable and separable with respect to the patterned structure.

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