Apparatus and method for detecting photon emissions from transistors
First Claim
1. A method of processing an integrated circuit CAD database for use in testing the integrated circuit with an imaging optical detector comprising:
- identifying the location of at least one transistor in the integrated circuit CAD database; and
processing the integrated circuit CAD database to define at least one photon detection location as a function of the location of the at least one transistor.
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Abstract
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
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Citations
38 Claims
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1. A method of processing an integrated circuit CAD database for use in testing the integrated circuit with an imaging optical detector comprising:
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identifying the location of at least one transistor in the integrated circuit CAD database; and
processing the integrated circuit CAD database to define at least one photon detection location as a function of the location of the at least one transistor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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18. The method of claim 18 wherein the at least one Boolean operation comprises:
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PMOS gate=Polysilicon polygon layer AND Nwell polygon layer; and
PMOS Drain and Source=Pdiffusion polygon layer AND Nwell polygon layer. - View Dependent Claims (19)
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Specification