Electromagnetic actuator, manufacturing method and optical scanner using the electromagnetic actuator
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Abstract
An electromagnetic actuator comprises a core with a coil wound around a stator magnetically coupled to each end of the cored a movable element that can be displaced relative to the stator, and a supporting means for supporting the movable element. The stator and the movable element each have a projection and a depression parallel to the displacement direction of the movable element and are placed in such a way that the projection and depression of the stator engage with the projection and depression of the movable element.
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Citations
38 Claims
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1-30. -30. (canceled)
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31. A method of manufacturing the electromagnetic actuator provided with a core with a coil wound around;
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a stator magnetically coupled at both ends of said core;
a movable element that can be displaced relative to said stator; and
a supporting means for supporting said movable element, said stator and said movable element each having a projection and a depression perpendicular to their respective displacement directions and being placed in such a way that the projection and depression of said stator engage with the projection and depression of said movable element, wherein a process of manufacturing said stator, said movable element and said supporting means comprises;
a step of forming a sacrificial layer on a substrate;
a step of forming an electrode layer on said substrate and said sacrificial layer;
a step of forming an insulated female mold layer on said electrode layer;
a step of electroplating a magnetic layer in an opening of said insulated female mold layer on said electrode layer; and
a step of removing said insulated female mold layer and said sacrificial layer. - View Dependent Claims (32, 33, 34, 35, 36)
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37. The method of manufacturing the electromagnetic actuator provided with a core with a coil wound around;
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a stator magnetically coupled at both ends of said core;
a movable element that can be displaced relative to said stator; and
a supporting means for supporting said movable element, said stator and said movable element each having a projection and a depression perpendicular to their respective displacement directions and being placed in such a way that the projection and depression of said stator engage with the projection and depression of said movable element, wherein a process of manufacturing said core with a coil comprise;
a step of forming coil lower wiring on the substrate;
a step of forming a first insulating layer on said coil lower wiring;
a step of forming an electrode layer on said first insulating layer;
a step of forming an insulated female mold layer on said electrode layer;
a step of electroplating a magnetic layer in the opening of said insulated female mold layer on said electrode layer;
a step of forming a second insulating layer on said magnetic layer; and
a step of forming coil upper wiring on said second insulating layer. - View Dependent Claims (38)
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Specification