Method and device for modulating light with a time-varying signal
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Accused Products
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
122 Citations
96 Claims
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1-53. -53. (canceled)
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54. A device for modulating light, comprising:
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first and second layers separated by a space, wherein a dimension of said space is changeable in response to a voltage applied across said first and second layers; and
a control circuit configured to apply the voltage across the first and second layers to maintain the dimension of said space at a desired height, said voltage comprising a time-varying signal. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67)
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68. A method of controlling first and second layers separated by a space, a dimension of said space being changeable in response to a voltage applied across said first and second layers, the method comprising:
applying said voltage across the first and second layers to maintain the dimension of said space at a desired height, said voltage being varying over time. - View Dependent Claims (69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82)
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83. A device for modulating light, comprising:
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first and second means for adjusting a dimension of a space there between, wherein the dimension of said space is changeable in response to a voltage applied across said first and second adjusting means; and
means for controlling application of the voltage across said first and second adjusting means to maintain the dimension of said space at a desired height, said voltage comprising a time-varying signal. - View Dependent Claims (84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96)
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Specification