Plasma-assisted coating

• US 20050233091A1
• Filed: 05/07/2003
• Published: 10/20/2005
• Est. Priority Date: 05/08/2002
• Status: Abandoned Application

• Current Assignee: BTU International, Incorporated (Amtech Systems, Inc.)
• Original Assignee: BTU International, Incorporated (Amtech Systems, Inc.)
• Inventors: Kumar, Devendra, Kumar, Satyendra
• Application Number:
  US10/513,221
• Publication Number:
  US 20050233091A1
• Time in Patent Office: Days
• US Class Current: 427/569
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H05H 1/24 Generating plasma nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/461 Microwave discharges

Abstract

Methods and apparatus are provided for igniting, modulating, and sustaining plasma (615) for various coating processes. In one embodiment, the surface of an object can be coated (247) by forming plasma in a cavity (230) with walls (232) by subjecting a gas to an amount of electromagnetic radiation power via electrode (270) and a voltage supply (275) in the presence of a plasma catalyst (240) in mount (245) and adding at least one coating material to the plasma. The material is allowed to deposit on the surface of the object (250) on mount (260) to form a coating (247). Various plasma catalysts are also provided.

Claims

1. A method of coating a first surface area of an object, comprising:

forming a plasma in a first cavity by subjecting a gas to an amount of electromagnetic radiation in the presence of a plasma catalyst;

adding at least one coating material to the plasma; and

allowing the at least one material to deposit on the surface area of the object to form a coating.

2. The method of claim 1, wherein the plasma catalyst is at least one of a passive plasma catalyst and an active plasma catalyst.

3. The method of claim 2, wherein the catalyst comprises at least one of metal, inorganic material, carbon, carbon-based alloy, carbon-based composite, electrically conductive polymer, conductive silicone elastomer, polymer nanocomposite, and an organic-inorganic composite.

4. The method of claim 3, wherein the catalyst is in the form of at least one of a nano-particle, a nano-tube, a powder, a dust, a flake, a fiber, a sheet, a needle, a thread, a strand, a filament, a yarn, a twine, a shaving, a sliver, a chip, a woven fabric, a tape, and a whisker.

5. The method of claim 4, wherein the catalyst comprises carbon fiber.

6. The method of claim 2, wherein the catalyst is in the form of at least one of a nano-particle, a nano-tube, a powder, a dust, a flake, a fiber, a sheet, a needle, a thread, a strand, a filament, a yarn, a twine, a shaving, a sliver, a chip, a woven fabric, a tape, and a whisker.

7. The method of claim 2, wherein the catalyst comprises at least one electrically conductive component and at least one additive in a ratio, the method further comprising sustaining the plasma, wherein the sustaining comprises:

directing additional electromagnetic radiation into the cavity; and

allowing the catalyst to be consumed by the plasma such that the plasma contains the at least one additive.

8. The method of claim 1, wherein the radiation has a frequency less than about 333 GHz, and wherein the plasma catalyst includes an active plasma catalyst comprising at least one ionizing particle.

9. The method of claim 8, wherein the at least one ionizing particle comprises a beam of particles.

10. The method of claim 1, further comprising sustaining the plasma during the allowing by directing a sufficient amount of electromagnetic radiation power into the cavity, wherein the directing is selected from a group consisting of continuously directing, periodically directing, programmed directing, and any combination thereof.

11. The method of claim 10, further comprising controlling a temperature associated with the plasma according to a predetermined temperature profile by varying at least one of a gas flow through the cavity and an electromagnetic radiation power level.

12. The method of claim 1, wherein the at least one material is at least one of a metal, a metal compound, a non-metal, a non-metal compound, a semiconductor, and a semiconductor compound.

13. The method of claim 1, wherein the plasma catalyst is carbonaceous and is used to ignite the plasma.

14. The method of claim 1, wherein the plasma catalyst is in the cavity.

15. The method of Claim 1, wherein the electromagnetic radiation density for the forming is about 2.5 W/cm³.

16. The method of claim 1, wherein the plasma is formed at a pressure at least about 1 atmosphere.

17. The method of claim 1, wherein the cavity is formed in a vessel and substantially confines the plasma.

18. The method of claim 1, wherein the vessel comprises a material comprising at least one of a ceramic material and quartz, and wherein the forming comprises transmitting the electromagnetic energy through a portion of the vessel.

19. The method of claim 1, wherein the vessel is inside an applicator comprising a material that is substantially non-transmissive to electromagnetic radiation.

20. The method of claim 19, wherein the vessel and the applicator are the same.

21. The method of claim 10, wherein the sustaining comprises estimating a temperature associated with either the plasma or the object by:

measuring a forward power of the electromagnetic radiation;

measuring a reflected power of the electromagnetic radiation;

estimating an amount of power consumption by determining a difference between the forward power and the reflected power over a time-period; and

determining the temperature using the estimated amount of power consumption.

22. The method of claim 10, further comprising cooling the object by at least one of flowing a cooling gas across the object, reducing the electromagnetic radiation power in the cavity, and circulating a fluid adjacent to the object.

23. The method of claim 1, wherein the plasma is formed within a vessel having an inner surface and the electromagnetic radiation has a wavelength λ

, the method further comprising;

positioning the first surface area of the object at a distance of at least about λ

/4 from a first portion of the inner surface of the vessel; and

positioning a second surface area of the object that should not be coated at a distance of less than about λ

/4 from a second portion of the inner surface of the vessel.

24. The method of claim 1, wherein the forming comprises supplying the amount of electromagnetic radiation power through a waveguide such that electromagnetic energy passes through the vessel and is absorbed by the gas to form the plasma.

25. The method of claim 1, wherein the vessel has an interior surface with at least one surface feature, wherein the allowing comprises forming a coating pattern on the object based on the at least one surface feature.

26. The method of claim 1, wherein the allowing forms a coating on the surface area of the object that is selected from a group consisting of a wear-resistant coating, a corrosion-resistant coating, and a combination thereof.

27. The method of claim 1, wherein a second cavity is connected to the first cavity, the method further comprising:

placing the object in the second cavity;

sustaining the plasma in the first cavity during the allowing; and

flowing the at least one coating material from the first cavity into the second cavity, thereby permitting the coating to form on the object in the second cavity.

28. The method of claim 1, wherein the first cavity is formed in a vessel that has an aperture, the method further comprising:

placing the object outside the first cavity near the aperture;

sustaining the plasma in the first cavity during the allowing; and

flowing the at least one coating material from the first cavity through the aperture to form a coating on the object.

29. The method of claim 1, wherein the cavity has a variable size, the system further comprising varying the size of the cavity.

30. The method of claim 1, wherein a bias is applied to the object such that the bias is selected from a group consisting of direct current bias, pulsed positive direct current bias, and pulsed negative direct current bias.

31. A coating produced by the method of claim 1.

32. A material deposition system comprising:

a first vessel in which a first cavity is formed;

an electromagnetic radiation source configured to direct electromagnetic radiation into the first cavity during deposition;

a gas source coupled to the first cavity such that a gas can flow into the cavity during deposition; and

a plasma catalyst located at a position selected from a group consisting of (a) in the first cavity, (b) near the first cavity, and (c) a combination thereof.

33. The system of claim 32, wherein the electromagnetic radiation power source comprises at least one of a waveguide and a coaxial cable.

34. The system of claim 32, wherein the plasma catalyst is at least one of a passive plasma catalyst and an active plasma catalyst.

35. The system of claim 32, wherein the passive catalyst comprises at least one of metal, inorganic material, carbon, carbon-based alloy, carbon-based composite, electrically conductive polymer, conductive silicone elastomer, polymer nanocomposite, and an organic-inorganic composite.

36. The system of claim 35, wherein the passive catalyst is in the form of at least one of a nano-particle, a nano-tube, a powder, a dust, a flake, a fiber, a sheet, a needle, a thread, a strand, a filament, a yarn, a twine, a shaving, a sliver, a chip, a woven fabric, a tape, and a whisker.

37. The system of claim 36, wherein the catalyst comprises carbon fiber.

38. The method of claim 32, wherein the catalyst is in the form of at least one of a nano-particle, a nano-tube, a powder, a dust, a flake, a fiber, a sheet, a needle, a thread, a strand, a filament, a yarn, a twine, a shaving, a sliver, a chip, a woven fabric, a tape, and a whisker.

39. The system of claim 32, wherein the passive catalyst comprises at least one electrically conductive component and at least one additive in a ratio.

40. The system of claim 32, wherein the electromagnetic radiation has a frequency less than about 333 GHz and the plasma catalyst comprises at least one ionizing particle.

41. The system of claim 40, wherein the at least one ionizing particle comprises a beam of particles.

42. The system of claim 32, further comprising an applicator in which the vessel is placed, wherein the applicator comprises a material that is substantially opaque to electromagnetic radiation power.

43. The system of claim 32, wherein the cavity is selected from a group consisting of an open cavity, a closed cavity, and a partially open cavity.

44. The system of claim 32, wherein the vessel has a top portion to prevent the plasma from rising during deposition.

45. The system of claim 32, further comprising a deposition controller for controlling at least one of the electromagnetic radiation directed into the cavity and the gas flowed into the cavity.

46. The system of claim 32, wherein the cavity has a variable size, the system further comprising a deposition controller for controlling the size of the cavity.

47. The system of claim 32, wherein the system further comprises an applicator comprising a material that is substantially non-transmissive to electromagnetic radiation, and wherein the vessel comprises a material that is substantially transmissive to electromagnetic radiation.

48. The system of claim 32, wherein the vessel has an inner surface and the electromagnetic radiation has a wavelength λ

, the vessel being adapted for positioning a first surface area of the object at a distance at least about λ

/4 from a first portion of the inner surface of the vessel and for positioning a second surface area of the object that should not be coated at a distance of less than about λ

/4 from a second portion of the inner surface of the vessel.

49. The system of claim 32, further comprising a second vessel in which a second cavity is formed, wherein the first and second cavities are connected such that the gas can flow from the first cavity to the second cavity during deposition.

50. The system of claim 32, wherein the vessel has an aperture that permits the gas to flow there through, the system further comprising an object-mounting device in a position outside the cavity proximate to the aperture such that the coating can form on the object during deposition.

51. The system of claim 32, further comprising an additional cavity, wherein the additional cavity is connected in series between the first cavity and the second cavity such that the gas can flow from the first cavity, through the additional cavity, to the second cavity.

52. The system of claim 32, further comprising a means for controlling a temperature associated with the plasma according to a predetermined temperature profile by varying at least one of a gas flow through the cavity, an electromagnetic radiation power level, additional electrical heating, and a circulating liquid bath.

53. The system of claim 32, further comprising an applicator comprising a material that is substantially non-transmissive to electromagnetic radiation, and wherein the vessel comprises a material that is substantially transmissive to electromagnetic radiation.

54. The system of claim 32, wherein the at least one coating material comprises at least one of a nitrogen source, an oxygen source, a carbon source, an aluminum source, an arsenic source, a boron source, chromium source, a gallium source, a germanium source, an indium source, a phosphorous source, a magnesium source, a silicon source, a tantalum source, a tin source, a titanium source, a tungsten source, a yttrium source, and a zirconium source.

55. The system of claim 32, wherein the coating comprises at least one of a carbide, an oxide, a nitride, a phosphide, an arsenide, and a boride.

56. The system of claim 54, wherein the coating material comprises at least one of tungsten carbide, tungsten nitride, tungsten oxide, tantalum nitride, tantalum oxide, titanium oxide, titanium nitride, silicon oxide, silicon carbide, silicon nitride, aluminum oxide, aluminum nitride, aluminum carbide, boron nitride, boron carbide, boron oxide, gallium phosphide, aluminum phosphide, chromium oxide, tin oxide, yttria, zirconia, silicon-germanium, indium tin oxide, indium gallium arsenide, aluminum gallium arsenide, boron, chromium, gallium, germanium, indium, phosphorous, magnesium, silicon, tantalum, fin, titanium, tungsten, yttrium, and zirconium.