Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
First Claim
1. A manufacturing method of laminated substrate comprising a step of preparing a substrate, a step of preparing electronic components, a step of mounting electronic components on a conductive area formed on a principal plane of the substrate, a step of preparing a sheet impregnated with a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range higher than first temperature range, and is cured in third temperature range higher than second temperature range, a step of preparing a perforated sheet having holes formed in a sheet for forming a space around electronic components when sheet is laminated on electronic components, a step of laminating the perforated sheet on electronic components, a first heating step of heating the perforated sheet to second temperature range and softening the thermosetting resin, a resin flowing step of compressing the perforated sheet from second temperature range to third temperature range, and flowing the thermosetting resin to fill in the space surrounding the electronic components, and a second heating step of heating the perforated sheet to third temperature range and curing the thermosetting resin.
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Accused Products
Abstract
The invention presents a manufacturing method of laminated substrate capable of realizing small size of portable electronic appliances. Prepreg 141 is a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range, and is cured in third temperature range, and integrating process (118) includes softening (120) of heating prepreg (141) to second temperature range, and softening the resin impregnated in prepreg (141), forced flowing (122) of compressing prepreg (141) before prepreg (141) comes to third temperature range, and forcing the resin to flow into space and gap formed among semiconductor (105), resistor (106), and substrate (101), and hardening (123) of heating prepreg (141) to third temperature range. As a result, without using intermediate material, space and gap formed among semiconductor (105), resistor (106), and substrate (101) can be securely filled with resin.
130 Citations
72 Claims
- 1. A manufacturing method of laminated substrate comprising a step of preparing a substrate, a step of preparing electronic components, a step of mounting electronic components on a conductive area formed on a principal plane of the substrate, a step of preparing a sheet impregnated with a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range higher than first temperature range, and is cured in third temperature range higher than second temperature range, a step of preparing a perforated sheet having holes formed in a sheet for forming a space around electronic components when sheet is laminated on electronic components, a step of laminating the perforated sheet on electronic components, a first heating step of heating the perforated sheet to second temperature range and softening the thermosetting resin, a resin flowing step of compressing the perforated sheet from second temperature range to third temperature range, and flowing the thermosetting resin to fill in the space surrounding the electronic components, and a second heating step of heating the perforated sheet to third temperature range and curing the thermosetting resin.
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26. A manufacturing method of laminated substrate comprising a step of preparing a substrate, a step of preparing electronic components, a step of mounting electronic components on a conductive area formed on a principal plane of the substrate, a step of preparing a sheet impregnated with a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range higher than first temperature range, and is cured in third temperature range higher than second temperature range, a step of preparing a perforated sheet having holes formed in a sheet for forming a space around electronic components when sheet is laminated on electronic components, a step of laminating the perforated sheet on electronic components, a first heating step of heating the perforated sheet to second temperature range and softening the thermosetting resin, a heating and compressing step of compressing the perforated sheet from the second temperature range to the third temperature range, and heating and compressing the resin, and a second heating step of heating the sheet to third temperature range after this heating and compressing step, wherein the heating and compressing step changes the pressure applied to the sheet depending on the viscosity of the resin.
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27. A manufacturing method of laminated substrate comprising a step of preparing a substrate, a step of preparing electronic components, a step of mounting electronic components on a conductive area formed on a principal plane of the substrate, a step of preparing a sheet impregnated with a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range higher than first temperature range, and is cured in third temperature range higher than second temperature range, a step of preparing a perforated sheet having holes formed in a sheet for forming a space around electronic components when sheet is laminated on electronic components, a step of laminating the perforated sheet on electronic components, a first heating step of heating the perforated sheet to second temperature range and softening the thermosetting resin, a heating and compressing step of compressing the perforated sheet from the second temperature range to the third temperature range, and heating and compressing the resin, and a second heating step of heating the sheet to third temperature range after this heating and compressing step, wherein the heating and compressing step changes the speed of compressing the sheet depending on the viscosity of the resin.
- 39. A semiconductor device for module comprising a semiconductor device forming a semiconductor circuit, and connection bumps connected to plural electrodes arrayed at one side of outer body of this semiconductor device, wherein the connection bumps have a first bump array having a plurality of connection bumps arranged so as to form a first space between adjacent connection bumps, and a second bump array having a plurality of connection bumps arranged so as to form a second space having a wider opening area than the opening area of the first space.
- 49. A manufacturing apparatus of laminated substrate for embedding electronic components in a laminated substrate, comprising laminating means for laminating a sheet by forming a space around electronic components on a substrate having lands and electrodes of electronic components provided on the upside connected and fixed by connection and fixing member, and integrating means provided at the downstream of the integrating means and integrating the sheet and substrate by heating and compressing, the sheet being a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range higher than first temperature range, and is cured in third temperature range higher than second temperature range, wherein the integrating means includes enclosing means surrounding the substrate and shielding the atmosphere, evacuating means connected to the enclosing means for evacuating by sucking air in the enclosing means, compressing means provided in the vertical direction of the substrate laminating the sheet for compressing the sheet, heating means provided in the compressing means for heating the compressing means to third temperature range, and driving means coupled to the compressing means, the manufacturing apparatus of laminated substrate further comprises a sensor provided in the compressing means for issuing a signal depending on the viscosity of the resin, and a driving means control circuit inserted between the sensor output and driving means, and the driving means control circuit compresses the sheet to the compressing means when the sheet temperature is within the second temperature range, and forces the resin to flow into the space between the electronic components and substrate.
- 66. A manufacturing apparatus of laminated substrate comprising suspending means provided on upside of compressing means for holding a sheet above electronic components so as to have a space around electronic components, wherein evacuating means evacuates nearly to vacuum state by sucking at least the air in the space.
Specification