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Wireless substrate-like sensor

  • US 20050233770A1
  • Filed: 03/08/2005
  • Published: 10/20/2005
  • Est. Priority Date: 02/06/2002
  • Status: Abandoned Application
First Claim
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1. A substrate-like sensor system for use in semiconductor processing tools, the sensor comprising:

  • a housing having a sensor for sensing a condition within a semiconductor processing tool;

    wherein the sensor system is configured to resemble a standard sized wafer; and

    wherein the sensor system includes at least one feature that reduces weight.

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