Controlling a material processing tool and performance data
First Claim
1. A material processing system comprising:
- a process tool; and
a process performance control system configured to control said process tool, said process performance control system comprises a process performance controller coupled to said process tool, wherein said process performance controller comprises a process performance prediction model configured to receive tool data from said process tool and predict process performance data, a process recipe correction filter configured to receive process performance data from said process performance prediction model and determine a process recipe correction, and a process controller configured to update a process recipe for said process tool using said process recipe correction.
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Abstract
According to an embodiment of the present invention, a material processing systeme (1) including a process tool (10) and a process performance control system (100). The process performance control system (100) includes a process performance controller (55) coupled to the process tool (10), where the process performance controller (55) includes a process performance prediction model (110), a process recipe correction filter (120), a process controller (130), and process performance model correction algorithm (150). The process performance prediction model (110) is configured to receive tool data from a plurality of sensors coupled to process tool (10) and to predict process performance data. The process recipe correction filter (120) is coupled to the process performance prediction model (110) and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control. The process controller (130) is coupled to the process recipe correction filter (120) and is configured to update a process recipe according to the process recipe correction.
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Citations
30 Claims
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1. A material processing system comprising:
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a process tool; and
a process performance control system configured to control said process tool, said process performance control system comprises a process performance controller coupled to said process tool, wherein said process performance controller comprises a process performance prediction model configured to receive tool data from said process tool and predict process performance data, a process recipe correction filter configured to receive process performance data from said process performance prediction model and determine a process recipe correction, and a process controller configured to update a process recipe for said process tool using said process recipe correction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A process performance control system for controlling a process tool comprising:
a process performance controller capable of being coupled to said process tool, said process performance controller comprises a process performance prediction model configured to receive tool data from said process tool and predict process performance data, a process recipe correction filter configured to receive process performance data from said process performance prediction model and determine a process recipe correction, and a process controller configured to update a process recipe for said process tool using said process recipe correction. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A material process system comprising:
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a process tool; and
means for controlling said process tool, said means for controlling comprising means for predicting process performance data using tool data received from said process tool, means for determining a process recipe correction using the process performance data, and means for updating a process recipe for said process tool using said process recipe correction.
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20. A method for controlling a process tool of a material processing system, the method comprising the steps of:
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executing a first process in said process tool using a process recipe;
recording tool data for said first process, said tool data comprises a plurality of tool data parameters;
predicting process performance data from said tool data for said first process using a process performance prediction model, said process performance data comprises one or more process performance data parameters;
determining a process recipe correction from said predicted process performance data using a process recipe correction filter;
updating said process recipe by incorporating said process recipe correction using a process controller coupled to said process tool; and
executing a second process in said process tool using said updated process recipe. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification