Dual-axis accelerometer
First Claim
1. A dual-axis accelerometer comprising:
- a supporting substrate;
a first fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates arranged in a first sensing axis;
a second fixed electrode supported on the substrate and including a second plurality of fixed capacitive plates arranged in a second sensing axis;
an inertial mass suspended over a cavity and including a first plurality of movable capacitive plates arranged to provide a first capacitive coupling with the first plurality of fixed capacitive plates and a second plurality of movable capacitive plates arranged to provide a second capacitive coupling with the second plurality of fixed capacitive plates, wherein the inertial mass is movable relative to the first and second electrodes;
a plurality of support arms for supporting the inertial mass relative to the first and second electrodes and allowing movement of the inertial mass upon experiencing accelerations along the first and second sensing axes;
an input for simultaneously applying first and second input signals to the accelerometer; and
an output electrically for providing a continuously available single output signal which varies as a function of the first and second capacitive couplings and is indicative of acceleration along the first and second sensing axes.
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Accused Products
Abstract
A dual-axis accelerometer and processing circuit are provided. The accelerometer has a plurality of fixed electrodes supported on a substrate and fixed capacitive plates arranged in first and second sensing axes. An inertial mass is suspended over a cavity and includes movable capacitive plates arranged to provide a capacitive couplings with the fixed capacitive plates. The inertial mass is movable relative to the plurality of fixed electrodes. The accelerometer has a plurality of support arms for supporting the inertial mass relative to the fixed electrodes and allowing movement of the inertial mass upon experiencing acceleration along the first and second sensing axes. The accelerometer further has inputs for receiving input signals and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of sensed acceleration. The processing circuit extracts the components of acceleration along the first and second sensing axes.
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Citations
27 Claims
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1. A dual-axis accelerometer comprising:
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a supporting substrate;
a first fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates arranged in a first sensing axis;
a second fixed electrode supported on the substrate and including a second plurality of fixed capacitive plates arranged in a second sensing axis;
an inertial mass suspended over a cavity and including a first plurality of movable capacitive plates arranged to provide a first capacitive coupling with the first plurality of fixed capacitive plates and a second plurality of movable capacitive plates arranged to provide a second capacitive coupling with the second plurality of fixed capacitive plates, wherein the inertial mass is movable relative to the first and second electrodes;
a plurality of support arms for supporting the inertial mass relative to the first and second electrodes and allowing movement of the inertial mass upon experiencing accelerations along the first and second sensing axes;
an input for simultaneously applying first and second input signals to the accelerometer; and
an output electrically for providing a continuously available single output signal which varies as a function of the first and second capacitive couplings and is indicative of acceleration along the first and second sensing axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 20, 21, 22, 26)
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11. A dual-axis accelerometer comprising:
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a supporting substrate;
a first bank of variable capacitors formed by a first plurality of fixed capacitive plates and a first plurality of movable capacitive plates for sensing acceleration along a first sensing axis;
a second bank of variable capacitors formed by a second plurality of fixed capacitive plates and a second plurality of movable capacitive plates for sensing acceleration along a second sensing axis;
an inertial mass that is movable in response to accelerations along the first and second sensing axes, wherein the inertial mass is electrically coupled to said first and second plurality of movable capacitive plates and is arranged so that said first and second plurality of movable capacitive plates form capacitive couplings with said first and second plurality of fixed capacitive plates;
a plurality of support arms supporting the inertial mass relative to the supporting substrate, such that the plurality of support arms allow movement of the inertial mass upon experiencing accelerations along the first and second sensing axes;
an input for simultaneously applying first and second input signals to the accelerometer; and
an output electrically for providing a continuously available single output signal indicative of acceleration sensing along the first and second sensing axes in response to movement of the inertial mass. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 23, 24, 25, 27)
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Specification