Interferometry systems and methods of using interferometry systems

• US 20050237536A1
• Filed: 04/22/2005
• Published: 10/27/2005
• Est. Priority Date: 04/22/2004
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A., Womack, Gary
• Granted Patent: US 7,280,224 B2
• Time in Patent Office: Days
• US Class Current: 356/500
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02059 Reducing effect of parasitic reflections, e.g. cyclic errors
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/02084 Processing in the Fourier or frequency domain when not imaged in the frequency domain
• CPC Class Codes: G01J 2009/0261 polarised
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position

Abstract

In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.

Claims

1. A method, comprising:

interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly;

determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position; and

deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.

2. The method of claim 1, wherein the frequency transform is a Fourier transform.

3. The method of claim 2, wherein the Fourier transform is a discrete Fourier transform.

4. The method of claim 2, deriving information about the surface figure profile of the measurement object comprises determining Fourier coefficients for a function characterizing the surface figure profile.

5. The method of claim 1, wherein the information about the surface figure profile is derived from a frequency transform of values of a second parameter, wherein for a given position the second parameter is based on the monitored distances of the measurement object along each of two of the measurement axes at the given position.

6. The method of claim 5, wherein the second parameter is also based on the monitored distance of the measurement object along one of the measurement axes at another position.

7. The method of claim 6, wherein determining the value of the second parameter for each position of the measurement object includes calculating a difference between the monitored distance along two of the measurement axes for multiple different positions of the measurement object.

8. The method of claim 1, wherein monitoring the distance between the interferometry assembly and the measurement object comprises simultaneously measuring a location of the measurement object along each of the measurement axes for each of the different positions of the measurement object.

9. The method of claim 1, further comprising determining values of a third parameter for different positions of the measurement object, wherein for each position the third parameter is based on the distance of the measurement object along each of two of the measurement axes at that position and the distance of the measurement object along one of the measurement axes at another position.

10. The method of claim 1, further comprising using the information about the surface figure profile of the measurement object to improve the accuracy of measurements made using the interferometry assembly.

11. The method of claim 1, further comprising using a lithography tool to expose a substrate with radiation passing through a mask while interferometrically monitoring the distance between the interferometry assembly and the measurement object, wherein the position of the substrate or the mask relative to a reference frame is related to the distance between the interferometry assembly and the measurement object.

12. The method of claim 1, wherein the interferometer assembly or the measurement object are attached to a stage and at least one of the monitored distances is used to monitor the position of the stage relative to a frame supporting the stage.

13. A lithography method for use in fabricating integrated circuits on a wafer, the method comprising:

supporting the wafer on a moveable stage;

imaging spatially patterned radiation onto the wafer;

adjusting the position of the stage; and

monitoring the position of the stage using the measurement object and using the information about the surface figure profile of the measurement object derived using the method of claim 1 to improve the accuracy of the monitored position of the stage.

14. A lithography method for use in the fabrication of integrated circuits comprising:

directing input radiation through a mask to produce spatially patterned radiation;

positioning the mask relative to the input radiation;

monitoring the position of the mask relative to the input radiation using the measurement object and using the information about the surface figure profile of the measurement object derived using the method of claim 1 to improve the accuracy of the monitored position of the mask; and

imaging the spatially patterned radiation onto a wafer.

15. A lithography method for fabricating integrated circuits on a wafer comprising:

positioning a first component of a lithography system relative to a second component of a lithography system to expose the wafer to spatially patterned radiation; and

monitoring the position of the first component relative to the second component using the measurement object and using the information about the surface figure profile of the measurement object derived using the method of claim 1 to improve the accuracy of the monitored position of the first component.

16. A method for fabricating integrated circuits, the method comprising the lithography method of claim 13.

17. A method for fabricating integrated circuits, the method comprising the lithography method of claim 14.

18. A method for fabricating integrated circuits, the method comprising the lithography method of claim 15.

19. A method for fabricating a lithography mask, the method comprising:

directing a write beam to a substrate to pattern the substrate;

positioning the substrate relative to the write beam; and

monitoring the position of the substrate relative to the write beam using the measurement object and using the information about the surface figure profile of the measurement object derived using the method of claim 1 to improve the accuracy of the monitored position of the substrate.

20. An apparatus, comprising:

a interferometer assembly configured to produce three output beams each including interferometric information about a distance between the interferometer and a measurement object along a respective axis; and

an electronic processor configured to determine values of a parameter or different positions of the measurement object from the interferometric information, wherein for a given position the parameter is based on the distances of the measurement object along each of the respective measurement axes at the given position,

the electronic processor being further configured to derive information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.

21. The apparatus of claim 20, wherein the measurement object is a plane mirror measurement object.

22. The apparatus of claim 20, wherein the three output beams each include a component that makes one pass to the measurement object along a common beam path.

23. The apparatus of claim 20, wherein the measurement axes are co-planar.

24. The apparatus of claim 20, wherein the measurement axes are parallel.

25. The apparatus of claim 20, further comprising a stage and wherein the interferometer assembly or measurement object are attached to the stage.

26. A lithography system for use in fabricating integrated circuits on a wafer, the system comprising:

a stage for supporting the wafer;

an illumination system for imaging spatially patterned radiation onto the wafer;

a positioning system for adjusting the position of the stage relative to the imaged radiation; and

the apparatus of claim 20 for monitoring the position of the wafer relative to the imaged radiation.

27. A lithography system for use in fabricating integrated circuits on a wafer, the system comprising:

a stage for supporting the wafer; and

an illumination system including a radiation source, a mask, a positioning system, a lens assembly, and the apparatus of claim 20,

wherein during operation the source directs radiation through the mask to produce spatially patterned radiation, the positioning system adjusts the position of the mask relative to the radiation from the source, the lens assembly images the spatially patterned radiation onto the wafer, and the apparatus monitors the position of the mask relative to the radiation from the source.

28. A beam writing system for use in fabricating a lithography mask, the system comprising:

a source providing a write beam to pattern a substrate;

a stage supporting the substrate;

a beam directing assembly for delivering the write beam to the substrate;

a positioning system for positioning the stage and beam directing assembly relative one another; and

the apparatus of claim 20 for monitoring the position of the stage relative to the beam directing assembly.

29. A method for fabricating integrated circuits, the method comprising using the lithography system of claim 26.

30. A method for fabricating integrated circuits, the method comprising using the lithography system of claim 27.