Resistive thermal sensing
First Claim
1. A calorimeter comprising:
- a resistive thermometer element that includes vanadium oxide;
circuitry through which electrical resistance of the thermometer element can be detected; and
a structure with a reaction region in which reactions that produce thermal change occur, the structure conducting temperature from reactions in the reaction region to the thermometer element.
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Accused Products
Abstract
Thermal sensors for calorimetry can include vanadium oxide, heavily p-doped amorphous silicon, or other materials with high temperature coefficients of resistivity. Such thermal sensors can have low noise equivalent temperature difference (NETD). For example, a thermal sensor with NETD no greater than 100 μK over a bandwidth range of approximately 3 Hz or more can include a thermistor including vanadium oxide sputtered at room temperature under conditions that yield primarily V2O5; more specifically, the NETD can be no greater than 35 μK, or even 10 μK over a bandwidth range of approximately 3 Hz or more. If a low noise thermal sensor has NETD no greater than 50 μK over such a bandwidth range, a low noise output circuitry connected to its thermistor can provide an electrical output signal that includes information about input thermal signal peaks with amplitude of approximately 100 μK.
85 Citations
24 Claims
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1. A calorimeter comprising:
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a resistive thermometer element that includes vanadium oxide;
circuitry through which electrical resistance of the thermometer element can be detected; and
a structure with a reaction region in which reactions that produce thermal change occur, the structure conducting temperature from reactions in the reaction region to the thermometer element. - View Dependent Claims (2, 3, 4, 5)
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6. A calorimeter comprising:
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a thermal sensor that includes a thermistor, the thermistor including vanadium oxide;
the thermal sensor having noise equivalent temperature difference (NETD) not greater than approximately 100 μ
K over a bandwidth range of approximately 3 Hz or more under the calorimeter'"'"'s operating conditions;
a structure with a thermal conducting path that provides a thermal input signal to the thermistor; and
detecting circuitry connected to the thermal sensor, the detecting circuitry allowing electrical detection of information about the thermal input signal. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A calorimeter comprising:
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a set of one or more low noise thermistors;
a structure with one or more thermal conducting paths, each thermal conducting path providing a respective thermal input signal to a respective subset of the set of thermistors; and
low noise detection circuitry connected to the set of thermistors, the detection circuitry allowing electrical detection of information about the thermal input signals. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. An array comprising:
not less than one calorimeter;
each calorimeter comprising;
a set of resistive thermometer elements, each including vanadium oxide;
circuitry through which electrical resistance of the thermometer elements can be detected; and
a structure with a reaction region in which reactions that produce thermal change occur, the structure conducting temperature from reactions in the reaction region to at least one of the thermometer elements. - View Dependent Claims (20, 21)
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22. A method of producing a calorimeter, comprising:
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producing a resistive thermometer element, circuitry through which electrical resistance of the thermometer element can be detected, and a structure with a reaction region in which reactions that produce thermal change occur;
the structure conducting temperature from reactions in the reaction region to the thermometer element;
the act of producing the resistive thermometer element, the circuitry, and the structure comprising;
producing the resistive thermometer element to include vanadium oxide. - View Dependent Claims (23, 24)
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Specification