Electromagnetically-actuated microfluidic flow regulators and related applications
First Claim
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1. An apparatus for regulating a microfluidic flow, the apparatus comprising:
- a substrate defining a fluid-conducting chamber;
a flexible membrane sealingly overlying the chamber, the membrane moveable between a first position and a second position, one of the positions of the membrane restricting the flow through the chamber to a greater degree than the other position; and
an electromagnetically-driven assembly disposed on the substrate over the membrane for unidirectionally deflecting the membrane from the first position to the second position, thereby regulating the flow through the chamber.
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Abstract
A variable, closed-loop apparatus for regulating a microfluidic flow that employs a low-power deflection assembly, which is surface-mounted over a flexible membrane overlying a chamber integrated into a microfabricated platform. A flexible membrane, moveable between two positions, sealingly overlies the chamber. One of the positions of the membrane restricts the flow through the chamber to a greater degree than the other position. A deflection assembly disposed on the substrate over the membrane unidirectionally deflects the membrane, thereby regulating the flow through the chamber.
233 Citations
49 Claims
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1. An apparatus for regulating a microfluidic flow, the apparatus comprising:
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a substrate defining a fluid-conducting chamber;
a flexible membrane sealingly overlying the chamber, the membrane moveable between a first position and a second position, one of the positions of the membrane restricting the flow through the chamber to a greater degree than the other position; and
an electromagnetically-driven assembly disposed on the substrate over the membrane for unidirectionally deflecting the membrane from the first position to the second position, thereby regulating the flow through the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A peristaltic micropump comprising:
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a substrate defining a ftuid-conducting chamber;
at least three flexible membranes seatingly overlying the chamber, each of the membranes being moveable between a first position and a second position, one of the positions of each of the membranes restricting the flow through the chamber to a greater degree than the other position; and
at least three electromagnetically-driven assemblies sequentially disposed on the substrate, each assembly being associated with one of the membranes and disposed thereover for unidirectionally deflecting the membrane such that each of the membranes is moved from the first position to the second position in a predetermined order, thereby causing a directional flow through the chamber.
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40. A micropump comprising:
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a substrate defining a fluid-conducting chamber, a first lumen, and a second lumen, the first lumen and the second lumen being in fluid communication with the chamber;
a first check valve disposed in the first lumen;
a second check valve disposed in the second lumen;
a flexible membrane sealingty overlying the chamber, the membrane moveable between a first position and a second position;
one of the positions of the membrane restricting the flow through the chamber to a greater degree than the other position; and
an electromagnetically-driven assembly disposed on the substrate over the membrane for unidirectionally deflecting the membrane from the first position to the second position, thereby causing a directional flow through the chamber. - View Dependent Claims (41)
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42. A method for manufacturing of an apparatus for regulating a microfluidic flow, the method comprising:
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(a) providing a plurality of platform layers, each platform layer having an adhesive layer disposed thereon, the plurality of platform layers including a first layer defining a flexible membrane;
(b) forming at least one aperture in each layer of a first portion of the plurality of platform layers;
(c) disposing a deflection assembly over the membrane; and
(d) laminating the plurality of platform layers to form a substrate defining a chamber therein such that the membrane overlies the chamber, the membrane being moveable between a first position and a second position, one of the positions of the membrane restricting the flow through the chamber to a greater degree than the other position, wherein the membrane is unidirectionally deflectable by the deflection assembly to regulate the flow through the chamber. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49)
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Specification