Refurbishment of a coated chamber component

• US 20050238807A1
• Filed: 04/27/2004
• Published: 10/27/2005
• Est. Priority Date: 04/27/2004
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Xu, Dajiang, Lin, Yixing, Stow, Clifford, Haney, Robert
• Application Number:
  US10/833,975
• Publication Number:
  US 20050238807A1
• Time in Patent Office: Days
• US Class Current: 427/248.100
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: B08B 7/0035 by radiant energy, e.g. UV, laser, light beam or the like
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: H01J 37/32431 Constructional details of the reactor
• CPC Class Codes: H01J 9/38 Exhausting, degassing, filling, or cleaning vessels

Abstract

A component of a process chamber is cleaned and refurbished. The component has a structure with an overlying coating having of a first layer. To refurbish the component, the first layer is removed to form an exposed surface on the structure. During or after the removal of the coating, the exposed surface is cleaned with a cleaning fluid, which deposits cleaning residue on the exposed surface. The exposed surface is heated in a substantially non-oxidizing atmosphere to a temperature that is sufficiently high to vaporize the cleaning residue from the surface, thereby forming a cleaned surface. A second layer is formed over the cleaned surface.

Claims

1. A method of refurbishing a component of a process chamber, the component comprising a structure having an overlying coating comprising a first layer, the method comprising:

(a) removing the first layer to form an exposed surface on the structure;

(b) during or after (a), cleaning the exposed surface with a cleaning fluid, thereby depositing cleaning residue on the exposed surface;

(c) heating the surface in a substantially non-oxidizing atmosphere to a temperature that is sufficiently high to vaporize the cleaning residue from the surface, thereby forming a cleaned surface; and

(d) forming a second layer over the cleaned surface.

2. A method according to claim 1 wherein (c) comprises heating the surface to a temperature of at least about 100°

C.

3. A method according to claim 1 wherein (c) comprises heating the surface in a substantially non-oxidizing atmosphere comprising less than about 1% by volume of oxygen gas.

4. A method according to claim 3 wherein (c) comprises heating the surface in an environment comprising at least about 99% percent by volume of nitrogen.

5. A method according to claim 3 wherein (c) comprises heating the surface while maintaining a vacuum pressure.

6. A method according to claim 1 wherein (b) comprises cleaning the surface with a cleaning fluid comprising an acidic solution or a basic solution.

7. A method according to claim 1 wherein (d) comprises generating an electrical arc that at least partially liquefies a metal material, and passing a pressurized gas past the liquefied metal material to propel the liquefied metal material towards the surface.

8. A method according to claim 7 wherein (d) comprises forming a second layer comprising at least one of aluminum, titanium, tantalum, copper and chromium.

9. A method according to claim 1 wherein the structure comprises at least one of aluminum, titanium, tantalum, stainless steel, copper and chromium.

10. A method according to claim 1 further comprising bead blasting the exposed surface.

11. A component fabricated according to the method of claim 1, wherein the component comprises at least a portion of one or more of an enclosure wall, a chamber shield, a gas energizer, a gas distributor, an exhaust conduit, and a substrate support.

12. A method of refurbishing a component of a process chamber, the component comprising a structure having an overlying coating comprising a first metal layer, the method comprising:

(a) removing the first metal layer to form an exposed surface on the structure;

(b) during or after (a), cleaning the exposed surface with a first cleaning fluid, thereby depositing first cleaning residue on the exposed surface;

(c) texturing the exposed surface by propelling blasting beads towards the surface;

(d) in a first baking step, heating the exposed surface in a substantially non-oxidizing environment to a temperature that is sufficiently high to vaporize first cleaning residue from the exposed surface, the substantially non-oxidizing atmosphere comprising less than about 1% by volume of oxygen gas;

(e) forming a second metal layer over the exposed surface, the second metal layer comprising a top surface;

(e) cleaning the top surface of the second metal layer with a second cleaning fluid, thereby depositing second cleaning residue on the top surface; and

(g) in a second baking step, heating the top surface of the second metal layer to a temperature that is sufficiently high to vaporize second cleaning residue from the top surface.

13. A method according to claim 12 wherein (d) comprises heating the surface to a temperature of at least about 100°

C.

14. A method according to claim 12 wherein (d) comprises heating the surface in an environment comprising at least about 99% percent by volume of nitrogen gas.

15. A method according to claim 12 wherein (d) comprises heating the surface while maintaining a vacuum pressure.

16. A method according to claim 12 wherein (b) comprises cleaning the exposed surface with cleaning fluid comprising de-ionized water, an acidic solution, or a basic solution.

17. A method according to claim 12 wherein (e) comprises generating an electrical arc that at least partially liquefies a metal material, and passing a pressurized gas past the liquefied metal material to propel the liquefied metal material towards the surface.

18. A method according to claim 17 wherein (e) comprises forming a second metal layer comprising at least one of aluminum, titanium, tantalum, copper and chromium.

19. A method according to claim 12 wherein the structure comprises at least one of aluminum, titanium, tantalum, stainless steel, copper and chromium.

20. A component fabricated according to the method of claim 12, wherein the component comprises at least a portion of one or more of an enclosure wall, a chamber shield, a gas energizer, a gas distributor, an exhaust conduit, and a substrate support.