Circuit and method of processing multiple-axis sensor output signals

• US 20050240374A1
• Filed: 04/27/2004
• Published: 10/27/2005
• Est. Priority Date: 04/27/2004
• Status: Active Grant

• Current Assignee: Delphi Technologies, Inc. (BorgWarner Incorporated)
• Original Assignee: Delphi Technologies, Inc. (BorgWarner Incorporated)
• Inventors: Zarabadi, Seyed R.
• Granted Patent: US 7,194,376 B2
• Time in Patent Office: Days
• US Class Current: 702/141
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A dual-axis accelerometer and processing circuit are provided. The accelerometer has a plurality of fixed electrodes supported on a substrate and fixed capacitive plates arranged in first and second sensing axes. An inertial mass is suspended over a cavity and includes movable capacitive plates arranged to provide a capacitive couplings with the fixed capacitive plates. The inertial mass is movable relative to the plurality of fixed electrodes. The accelerometer has a plurality of support arms for supporting the inertial mass relative to the fixed electrodes and allowing movement of the inertial mass upon experiencing acceleration along the first and second sensing axes. The accelerometer further has inputs for receiving input signals and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of sensed acceleration. The processing circuit extracts the components of acceleration along the first and second sensing axes.

Claims

1. A signal processing circuit for processing signals generated by a multiple-axis sensor comprising:

an input for receiving a sensor signal generated by a multiple-axis sensor;

a first demodulator for demodulating the sensor signal to generate a first signal indicative of a sensed parameter in a first sensing axis;

a second demodulator for demodulating the sensor signal to generate a second signal indicative of a sensed parameter in a second sensing axis; and

an output for providing the first and second signals.

2. The circuit as defined in claim 1, wherein the sensor comprises a capacitive type dual-axis accelerometer.

3. The circuit as defined in claim 1 further comprising a feedback loop for feeding the demodulated signals to the input.

4. The circuit as defined in claim 1 further comprising a charge-to-voltage converter for converting a charge signal output generated by the sensor to a voltage signal.

5. The circuit as defined in claim 1, wherein the first and second demodulators each comprises a switched capacitor synchronous demodulator.

6. The circuit as defined in claim 1 further comprising a first filter for filtering the voltage signal generated by the first demodulator, and a second filter for filtering the voltage signal generated by the second demodulator.

7. The circuit as defined in claim 1 further comprising offset circuitry for adjusting offset in each of the demodulated signals.

8. The circuit as defined in claim 1 further comprising gain compensation circuitry for adjusting gain of the demodulated signals.

9. The circuit as defined in claim 1, wherein the circuit comprises analog circuitry.

10. The circuit as defined in claim 1, wherein the circuit comprises digital circuitry.

11. The circuit as defined in claim 1, wherein the first sensing axis is substantially orthogonal to the second sensing axis.

12. The circuit as defined in claim 1, wherein the sensor senses a component of acceleration in the first sensing axis and a component of acceleration in the second sensing axis for use on a vehicle.

13. A method of processing a sensor signal generated by a sensor for sensing a parameter pertaining to multiple sensing axes, said method comprising the steps of:

receiving an sensor signal generated by a sensor;

demodulating the sensor signal to generate a first signal indicative of a sensed parameter in a first sensing axis;

demodulating the sensor signal to generate a second signal indicative of a sensed parameter in a second sensing axis; and

outputting the first and second signals.

14. The method as defined in claim 13, wherein the step of receiving the sensor signal generated by a sensor comprises receiving an output signal from a capacitive type dual-axis accelerometer.

15. The method as defined in claim 13 further comprising the step of converting a charge output signal generated by the sensor to a voltage signal.

16. The method as defined in claim 13, wherein the steps of modulating the sensor signal comprises multiplying the sensor signal by first and second clocked signals, wherein the first and second clocked signals are out of phase by a predetermined amount.

17. The method as defined in claim 13 further comprising the steps of filtering the first signal and filtering the second signal.

18. The method as defined in claim 13 further comprising the step of adjusting for offset in each of the first and second signals.

19. The method as defined in claim 13 further comprising the step of adjusting gain in each of the first and second signals.

20. The method as defined in claim 13, wherein the first sensing axis is substantially orthogonal to the second sensing axis.

21. The method as defined in claim 13, wherein the parameter comprises acceleration for use on a vehicle.