Integrated circuit burn-in methods and apparatus

• US 20050240844A1
• Filed: 06/28/2005
• Published: 10/27/2005
• Est. Priority Date: 07/02/2001
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Kacprowicz, Richard, Pullen, David H.
• Granted Patent: US 7,449,904 B2
• Time in Patent Office: Days
• US Class Current: 714/724
• CPC Class Codes: G01R 31/2642 Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
• CPC Class Codes: G01R 31/2849 Environmental or reliability testing, e.g. burn-in or validation tests of individual semiconductors G01R31/2642; of printed circuits boards G01R31/2817; of IC's G01R31/2855
• CPC Class Codes: G01R 31/287 Procedures; Software aspects

Abstract

Improved methods for performing burn-in of electronic components, such as integrated circuits (ICs) with on-board thermal sense circuits, are used to obtain a higher bin split. According to an embodiment, a thermal set-point is loaded into each IC. While the ICs are maintained at a constant elevated temperature, the burn-in system checks each IC to determine whether the set-point has been exceeded. If so, it characterizes the IC by that set-point; if not, it decrements the set-point and checks again. The method continues until all ICs have been characterized to a specific set-point. As a result of the method, a junction temperature is obtained for each IC. In addition, a real-time estimate of the burn-in time for each IC is obtained, so that burn-in time can be adjusted to maximize burn-in throughput. Apparatus for implementing improved IC burn-in is also described.

Claims

1. An integrated circuit (IC) comprising:

interface circuitry to interface the IC to a burn-in system, the interface circuitry to receive at least one temperature value from the burn-in system and to send at least one temperature indication to the burn-in system;

a storage circuit coupled to the interface circuitry to store the at least one temperature value; and

a thermal sense circuit coupled to the interface circuitry to provide the at least one temperature indication.

2. The IC recited in claim 1, wherein the at least one temperature value is a set-point.

3. The IC recited in claim 1, wherein the at least one temperature indication is proportional to a junction temperature of the IC.

4. A burn-in system for an integrated circuit (IC) comprising a thermal sense circuit, the burn-in system comprising:

a fixture to electrically couple to the IC;

a temperature-altering mechanism to alter the ambient temperature of the IC; and

a data processing system coupled to the fixture, the data processing system executing a computer program, the computer program operating the burn-in system to characterize the IC and comprising the operations of;

storing a temperature value for the IC;

controlling the temperature-altering mechanism to thermally stress the IC;

determining whether a temperature indication from the thermal sense circuit substantially matches the temperature value;

if so, recording the temperature value; and

if not, changing the temperature value to a new temperature value and determining whether the temperature indication matches the new temperature value.

5. The burn-in system recited in claim 4, wherein the computer program operating the burn-in system further comprises the operations of:

determining whether the temperature indication matches the new temperature value;

if so, recording the new temperature value;

otherwise, repeatedly changing the temperature value and comparing the temperature indication with the changed temperature value, until the temperature indication matches the changed temperature value; and

recording the changed temperature value.

6. The burn-in system recited in claim 4, wherein the temperature value is stored in a storage circuit in the IC.

7. The burn-in system recited in claim 4, wherein the temperature value is stored in a storage element in the data processing system.

8. A method of testing an integrated circuit (IC) comprising a plurality of electronic devices, one of which is to provide a temperature indication, the method comprising:

storing a temperature value for the IC;

thermally stressing the IC;

the one electronic device providing a temperature indication;

determining whether the temperature indication matches the temperature value;

if so, recording the temperature value; and

if not, changing the temperature value to a new temperature value and determining whether the temperature indication matches the new temperature value.

9. The method recited in claim 8 and further comprising;

if the temperature indication matches the new temperature value, recording the temperature value;

otherwise, repeatedly changing the temperature value and comparing the temperature indication with the changed temperature value, until the temperature indication matches the changed temperature value; and

recording the changed temperature value.

10. The method recited in claim 8, wherein storing is performed by another one of the plurality of electronic devices in the IC.

11. The method recited in claim 8, wherein storing is performed by a burn-in system coupled to the IC and comprising a stored-program digital computer.

12. The method recited in claim 8, wherein the plurality of electronic devices includes a logic circuit, and wherein determining is performed by the logic circuit.

13. The method recited in claim 8, wherein determining is performed by a burn-in system coupled to the IC and comprising a stored-program digital computer.

14. A method of testing a plurality of integrated circuits (ICs), each comprising a thermal sense circuit, the method comprising:

storing a temperature value for each IC;

thermally stressing the ICs;

each thermal sense circuit providing a temperature indication for its respective IC;

determining whether the temperature indication matches the temperature value;

if so, recording the temperature value for the corresponding IC; and

if not, changing the temperature value to a new temperature value and determining whether the temperature indication matches the new temperature value.

15. The method recited in claim 14 and further comprising;

if the temperature indication matches the new temperature value, recording the temperature value for the corresponding IC;

otherwise, repeatedly changing the temperature value and comparing the temperature indication with the changed temperature value, until the temperature indication matches the changed temperature value; and

recording the changed temperature value for the respective IC.

16. The method recited in claim 14, wherein each IC comprises a storage circuit, and wherein storing is performed by the storage circuit.

17. The method recited in claim 14, wherein storing is performed by a burn-in system coupled to the IC and comprising a stored-program digital computer.

18. The method recited in claim 14, wherein each IC comprises a logic circuit, and wherein determining is performed by the logic circuit.

19. The method recited in claim 14, wherein determining is performed by a burn-in system coupled to the IC and comprising a stored-program digital computer.

20. A method of testing a plurality of electronic components, each comprising a thermal sense circuit, the method comprising:

storing a temperature value for each electronic component;

thermally stressing the electronic components;

each thermal sense circuit providing a temperature indication for its respective electronic component;

determining whether the temperature indication matches the temperature value;

if so, recording the temperature value for the corresponding electronic component; and

if not, changing the temperature value to a new temperature value and determining whether the temperature indication matches the new temperature value.

21. The method recited in claim 20 and further comprising;

if the temperature indication matches the new temperature value, recording the temperature value for the corresponding electronic component;

otherwise, repeatedly changing the temperature value and comparing the temperature indication with the changed temperature value, until the temperature indication matches the changed temperature value; and

recording the changed temperature value for the respective electronic component.

22. The method recited in claim 20, wherein each electronic component comprises a storage circuit, and wherein storing is performed by the storage circuit.

23. The method recited in claim 20, wherein storing is performed by a burn-in system coupled to the electronic component and comprising a stored-program digital computer.

24. The method recited in claim 20, wherein each electronic component comprises a logic circuit, and wherein determining is performed by the logic circuit.

25. The method recited in claim 20, wherein determining is performed by a burn-in system coupled to the electronic component and comprising a stored-program digital computer.

26. The method recited in claim 20, wherein the electronic components are integrated circuits.

27. A computer-readable medium containing computer instructions for instructing a processor to perform a method of binning a plurality of integrated circuits (ICs) each having a thermal sense circuit, the processor forming an element in a system comprising a temperature-altering mechanism to thermally stress the ICs and a comparison mechanism, wherein the instructions comprise:

storing a temperature value for each IC;

obtaining a temperature indication from the thermal sense circuit of each IC;

for each IC not yet binned, comparing the stored temperature value with the temperature indication; and

if the temperature indication substantially matches the stored temperature value, recording the temperature value;

otherwise, changing the temperature value to a new temperature value and comparing the new temperature value with the temperature indication.

28. The computer-readable medium recited in claim 27, wherein the instructions further comprise:

if the temperature indication substantially matches the new temperature value, recording the new temperature value;

otherwise, repeatedly changing the temperature value and comparing the temperature indication with the changed temperature value, until the temperature indication substantially matches the changed temperature value, and recording the changed temperature value.

29. The computer-readable medium recited in claim 27, wherein the instructions further comprise:

determining an estimate of the burn-in time for each IC, using the particular temperature value recorded for each IC.