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Self-stabilizing, floating microelectromechanical device

  • US 20050241394A1
  • Filed: 04/30/2004
  • Published: 11/03/2005
  • Est. Priority Date: 04/30/2004
  • Status: Active Grant
First Claim
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1. A floating MEMS device comprising:

  • a) an electrostatically charged proof mass; and

    , b) at least two stabilizing electrode structures carrying charges that repel said charges on said proof mass, wherein i) said proof mass is located with respect to said stabilizing electrode structures so as to levitate due to like-charge repulsion between said proof mass and said stabilizing electrode structures; and

    wherein ii) said proof mass and said stabilizing electrode structures are located so as to produce electrostatic repulsion leading to stable levitation such that displacements of said proof mass from its equilibrium floating position result in electrostatic forces on said proof mass tending to return said proof mass to said equilibrium position.

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