Self-stabilizing, floating microelectromechanical device
First Claim
1. A floating MEMS device comprising:
- a) an electrostatically charged proof mass; and
, b) at least two stabilizing electrode structures carrying charges that repel said charges on said proof mass, wherein i) said proof mass is located with respect to said stabilizing electrode structures so as to levitate due to like-charge repulsion between said proof mass and said stabilizing electrode structures; and
wherein ii) said proof mass and said stabilizing electrode structures are located so as to produce electrostatic repulsion leading to stable levitation such that displacements of said proof mass from its equilibrium floating position result in electrostatic forces on said proof mass tending to return said proof mass to said equilibrium position.
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Abstract
The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the proof mass. The electrical properties of the electrodes causing floating, such as currents and/or voltages, typically change in response to environmental perturbations affecting the proof mass. Measuring such currents and/or voltages allow immediate and accurate measurements to be performed related to those perturbations affecting the location and/or the orientation of the proof mass. Additional sensing electrodes can be included to further enhance sensing capabilities. Drive electrodes can also be included that allow forces to be applied to the charged proof mass resulting in a floating, electrically controllable MEMS device. Several applications are described including accelerometers, inertial sensors, resonators and filters for communication devices, gyros, one and two axis mirrors and scanners, among other devices. Several fabrication methods are also described.
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Citations
20 Claims
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1. A floating MEMS device comprising:
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a) an electrostatically charged proof mass; and
,b) at least two stabilizing electrode structures carrying charges that repel said charges on said proof mass, wherein i) said proof mass is located with respect to said stabilizing electrode structures so as to levitate due to like-charge repulsion between said proof mass and said stabilizing electrode structures; and
whereinii) said proof mass and said stabilizing electrode structures are located so as to produce electrostatic repulsion leading to stable levitation such that displacements of said proof mass from its equilibrium floating position result in electrostatic forces on said proof mass tending to return said proof mass to said equilibrium position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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- 19. A flux capacitor comprising an electrically charged rotor electrostatically levitated between two stators wherein said stators carry like charges as said rotor and wherein time-varying voltage applied to said stators is capable of causing said rotor to rotate.
Specification