Combined absolute-pressure and relative-pressure sensor
First Claim
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1. A micromechanical sensor for measuring at least a first pressure of a first medium, comprising:
- at least one substrate, the substrate including at least two sensor elements, the at least two sensor elements including a first sensor element measuring an absolute-pressure variable of the first medium and a second sensor element measuring a relative-pressure variable of the first medium.
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Abstract
A micromechanical sensor for measuring at least a first pressure of a first medium, as well as a method for manufacturing such a micromechanical sensor. The micromechanical sensor has at least one substrate having at least two sensor elements, which are preferably made of a semiconductive material. The substrate has at least a first sensor element for measuring an absolute-pressure variable of the first medium and a second sensor element for measuring a relative-pressure variable of the first medium.
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13 Claims
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1. A micromechanical sensor for measuring at least a first pressure of a first medium, comprising:
at least one substrate, the substrate including at least two sensor elements, the at least two sensor elements including a first sensor element measuring an absolute-pressure variable of the first medium and a second sensor element measuring a relative-pressure variable of the first medium. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for manufacturing a micromechanical pressure sensor for measuring at least a pressure of a first medium, the method comprising:
producing, in a substrate, at least a first sensor element for measuring an absolute-pressure variable and a second sensor element for measuring a relative-pressure variable. - View Dependent Claims (9, 10, 11, 12, 13)
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