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Combined absolute-pressure and relative-pressure sensor

  • US 20050241400A1
  • Filed: 04/19/2005
  • Published: 11/03/2005
  • Est. Priority Date: 04/29/2004
  • Status: Active Grant
First Claim
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1. A micromechanical sensor for measuring at least a first pressure of a first medium, comprising:

  • at least one substrate, the substrate including at least two sensor elements, the at least two sensor elements including a first sensor element measuring an absolute-pressure variable of the first medium and a second sensor element measuring a relative-pressure variable of the first medium.

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