Wet etching system
First Claim
1. A wet etching system, comprising:
- a substrate holding chamber;
a drying chamber;
a cleaning chamber;
a wet etching region;
an elevator; and
a conveyor arranged above the drying chamber, the cleaning chamber, and the wet etching region, the conveyor communicating with both the substrate holding chamber and the elevator.
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Accused Products
Abstract
A wet etching system includes a substrate holding chamber (211), a drying chamber (218), a cleaning chamber (217), a wet etching region, an elevator (213), a conveyor (212) arranged above the drying chamber. The cleaning chamber, and the wet etching region, the conveyor communicating with both the substrate holding chamber and the elevator. A substrate being transmitted along the conveyor can avoid shaking, vibration and other disturbances caused by high pressure cleaning. In addition, because the etching chambers are located relatively far away from the substrate holding chamber, there is reduced risk of substrates that are held in the substrate holding chamber being contaminated by chemical reagents used in the etching processes. Furthermore, when two wet etching systems are arranged substantially diagonally opposite each other, the interspace therebetween conveniently serves as a common access region for maintenance and cleaning of the wet etching systems.
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Citations
16 Claims
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1. A wet etching system, comprising:
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a substrate holding chamber;
a drying chamber;
a cleaning chamber;
a wet etching region;
an elevator; and
a conveyor arranged above the drying chamber, the cleaning chamber, and the wet etching region, the conveyor communicating with both the substrate holding chamber and the elevator. - View Dependent Claims (2, 3, 4)
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- 5. A wet etching system, comprising a substrate holding chamber and a wet etching region, the wet etching region defining a first horizontal transmission path, a vertical transmission path with an elevator, and a second horizontal transmission path with wet etching chambers sequentially provided therealong.
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9. A wet etching system comprising:
a sub-system including;
a substrate holding chamber where an external raw substrate comes in for etching and an etched substrate goes out for next manufacturing;
an etching operation loop-like path defined in the system starting and terminating both at the substrate holding chamber;
a wet etching region, a cleaning chamber and a drying chamber being successively arranged in said operation path in sequence;
whereinsaid operation path defines two levels. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
Specification